The invention discloses a measurement system comprising a lens component, an imaging unit, a film thickness measuring unit, and a processing unit. The lens component is configured to receive reflected light from a measured sample and divide the reflected light at least into first reflected light and second reflected light. The imaging unit is configured to receive the first reflected light in order to obtain imaging data of the surface of the measured sample, wherein the imaging data includes the distribution information of measured holes in at least one detection area of the measured sample. The film thickness measuring unit is configured to receive the second reflected light in order to obtain data of film thickness at the bottoms of the measured holes. The processing unit is in communication connection with the imaging unit and the film thickness measuring unit, and is configured to determine the detection path of the measured holes based on the distribution information, enable the film thickness measuring unit to obtain data of film thickness at the bottom of each measured hole based on the detection path of the measured holes and finish measurement of the measured holes in the at least one detection area.