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发明公开
CN106995911A 蒸发源、沉积设备以及用于蒸发有机材料的方法 有权

蒸发源、沉积设备以及用于蒸发有机材料的方法
摘要：
描述了一种用于有机材料的蒸发源。所述蒸发源包括蒸发坩埚，其中所述蒸发坩埚配置成蒸发所述有机材料；具有一个或多个出口的分布管，其中所述分布管与所述蒸发坩埚流体地连通，并且其中所述分布管可在蒸发期间绕轴旋转；以及用于防护所述有机材料的至少一个侧面防护罩。
摘要（英）：

The invention provides an evaporation source for organic materials. The evaporation source comprises an evaporation crucible, a distribution tube and at least one side-face protection cover, wherein the evaporation crucible is arranged to be used for evaporating the organic materials, the distribution tube is provided with one or more outlets, the distribution tube communicates with the evaporation crucible in a fluidic manner, the distribution tube can rotate around a shaft in the evaporation process, and the side-face protection covers are used for protecting the organic materials.

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