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发明授权
CN106663644B 半导体基板表面的有机物污染评价方法及其应用 有权

半导体基板表面的有机物污染评价方法及其应用
摘要：
本发明的一种形态涉及一种半导体基板表面的有机物污染评价方法，该方法包括：在评价对象半导体基板表面获得光致发光强度信息；根据所获得的光致发光强度信息，对评价项目进行评价，该评价项目选自由评价对象半导体基板表面的有机物污染的有无、程度和面内分布所组成的群。
摘要（英）：

An embodiment according to the present invention relates to a method for evaluating organic material contamination on the surface of a semiconductor substrate that includes acquisition of photoluminescence intensity information on the surface of the semiconductor substrate being evaluated as well as performing evaluation of evaluation items selected from a group formed from absence or presence, extent, and surface distribution of organic material contamination on the surface of the semiconductor substrate being evaluated on the basis of the acquired photoluminescence intensity information.

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