知搜-全球专利检索

  1. 登录
  2. 注册
发明授权
CN106415393B 负型感光性树脂组合物、使其固化而成的固化膜及其制造方法、以及具有其的光学设备及背面照射型CMOS图像传感器 有权

负型感光性树脂组合物、使其固化而成的固化膜及其制造方法、以及具有其的光学设备及背面照射型CMOS图像传感器
摘要：
本发明的课题在于开发一种可得到矩形截面的图案的负型感光性树脂组合物，所述矩形截面的图案具有高折射率、无需追加后曝光工艺的高透明性的特性，在曝光时具有高敏感度，且图案形成后的分辨性、耐溶剂性优异，适用于像素形成、隔壁形成。通过下述负型感光性树脂组合物可解决上述课题，所述负型感光性树脂组合物的特征在于，含有以下(a)～(d)：(a)金属化合物粒子；(b)聚硅氧烷化合物；(c)具有1个以上包含α,β‑不饱和羧酸酯结构的基团的化合物；(d)光聚合引发剂，进一步含有(e)具有马来酰亚胺基的化合物。
摘要（英）：

The present invention has been completed to develop a negative photosensitive resin composition that exhibits high refractive index, high transparency properties with no additional post-exposure process, high sensitivity in the exposure, and high resolution and solvent resistance after the pattern formation, and which is capable of providing a pattern having a rectangular cross section adapted for pixel formation and partition formation. Such object is achieved by a negative photosensitive resin composition comprising the following (a) to (d): (a) metallic compound particles, (b) a polysiloxane compound, (c) a compound having at least 1 group containing an ±,²-unsaturated carboxylate ester structure, and (d) a photopolymerization initiator, the composition further comprising (e) a compound containing maleimide group.

公开/授权文献
0/0