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发明公开
CN106133874A 用于快速冷却基板的方法与装置 有权

用于快速冷却基板的方法与装置
摘要：
本文提供一种用以快速冷却基板的方法与装置。在一些实施方式中，冷却腔室包含：腔室本体，具有内部空间；基板支撑件，设置在空间中并具有基板支撑表面；板，相对基板支撑件而设置在腔室本体中且可相对基板支撑件在第一位置和第二位置间移动，其中第一位置将基板支撑件及板设置成彼此远离，以将支撑表面曝露至第一空间，且第二位置将基板支撑件及板设置成彼此邻近，以将支撑表面曝露至第二空间，第二空间小于第一空间；多个流动通道，设置在板或基板支撑件中的一或多个中，以使冷却剂流动；及气体入口，用以提供气体进入第二空间。
摘要（英）：

Methods and apparatus for rapidly cooling a substrate are provided herein. In some embodiments, a cooling chamber includes: a chamber body having an inner volume; a substrate support disposed in the volume and having a substrate support surface; a plate disposed in the chamber body opposite the substrate support and movable with respect to the substrate support between a first position and a second position, wherein the first position disposes the substrate support and plate away from each other to expose the support surface to a first volume, and the second position disposes the substrate support and plate adjacent to each other to expose the support surface to a second volume smaller than the first volume; a plurality of flow channels disposed in one or more of the plate or the substrate support to flow a coolant; and a gas inlet to provide a gas into the second volume.

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