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发明授权
CN106133184B 用于有机材料的蒸发源 有权

用于有机材料的蒸发源
摘要：
描述一种用于在基板上沉积两种或更多种有机材料的蒸发源阵列。所述蒸发源阵列包括：两个或更多个蒸发坩锅，其中所述两个或更多个蒸发坩锅被配置成蒸发所述两种或更多种有机材料；两个或更多个分配管道，所述两个或更多个分配管道具有沿所述两个或更多个分配管的长度而提供的出口，其中所述两个或更多个分配管道中的第一分配管道与所述两个或更多个蒸发坩锅中的第一蒸发坩锅流体连通；两个或更多个热屏蔽件，所述两个或更多个热屏蔽件包围所述第一分配管道；冷却屏蔽布置，所述冷却屏蔽布置提供在所述两个或更多个分配管道的至少一侧，其中所述至少一侧是提供所述出口的那侧；以及冷却元件，所述冷却元件提供在所述冷却屏蔽布置处或中，用于对所述冷却屏蔽布置的主动冷却。
摘要（英）：

An evaporation source array for depositing two or more organic materials on a substrate is described. The evaporation source array includes two or more evaporation crucibles, wherein the two or more evaporation crucibles are configured to evaporate the two or more organic materials, two or more distribution pipes with outlets provided along the length of the two or more distribution pipes, wherein a first distribution pipe of the two or more distribution pipes is in fluid communication with a first evaporation crucible of the two or more evaporation crucibles, two or more heat shields, which surround the first distribution pipe, a cooling shield arrangement provided at at least one side of the two or more distribution pipes, wherein the at least one side is the side at which the outlets are provided, and a cooling element provided at or in the cooling shield arrangement for active cooling of the cooling shield arrangement.

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