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发明授权
CN105811913B 声波器件 有权

声波器件
摘要：
一种声波器件，该声波器件包括：Y‑切割X‑传播钽酸锂基板，所述Y‑切割X‑传播钽酸锂基板具有20°或更大且48°或更小的切割角；以及格栅电极，所述格栅电极由层叠在基板上的一个或更多个金属膜组成，并且激发声波，其中，当所述一个或更多个金属膜中的各个金属膜的密度由ρi表示，各个金属膜的泊松比由Pi表示，各个金属膜的膜厚度由hi表示，Cu的密度由ρ0表示，Cu的泊松比由P0表示，并且节距由λ表示时，对于所述一个或更多个金属膜，各个金属膜的“(hi/λ)×(ρi/ρ0)×(Pi/P0)”的总值大于0.08。
摘要（英）：

An acoustic wave device includes: a Y-cut X-propagation lithium tantalate substrate having a cut angle of 20° or more and 48° or less; and a grating electrode that is composed of one or more metal films laminated on the substrate, and excites an acoustic wave, wherein when a density of each metal film in the one or more metal films is represented by ρi, a Poisson's ratio of each metal film is represented by Pi, a film thickness of each metal film is represented by hi, a density of Cu is represented by ρ0, a Poisson's ratio of Cu is represented by P0 and a pitch is represented by λ, a total value of “(hi/λ)×(ρi/ρ0)×(Pi/P0)” for each metal film with respect to the one or more metal films is more than 0.08.

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