To flexibly handle variable-product variable-quantity production of manufacturing devices. A device manufacturing system includes: A large number of sealed-type unit process apparatuses are portable, preferably have a standardized outline, and process a single process in the manufacturing process; a sealed conveyor container holding wavers; sealed wafer enter-and-leave front chambers mounted at same positions in different unit process apparatuses to send/receive the wafers between the processing parts and the sealed conveyor container. It is characterized in that the sealed-type unit process apparatuses are same in shape, and meanwhile, the wafer enter-and-leave front chambers have same wafer send/receive mechanisms and shapes.