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发明公开
CN105355702A 用于增强红外光谱探测的石墨烯等离激元器件及制备方法 有权

用于增强红外光谱探测的石墨烯等离激元器件及制备方法
摘要：
本发明提供了一种用于增强红外光谱探测的石墨烯等离激元器件，包括：自下而上依次设置的衬底、电介质层、石墨烯层、源极与漏极金属层，以及待检测物质；其中，衬底同时作为栅极，电介质层沉积在衬底上，石墨烯层覆盖于电介质层之上，源极与漏极金属层沉积在石墨烯层上，源极与漏极金属层由石墨烯导通，衬底与石墨烯层之间夹着电介质层；源极与漏极金属层之间的石墨烯层的局部区域具有周期性微纳米结构；周期性微纳米结构包含多个连续纵剖面为台阶状的结构，待测材料层设置以覆盖台阶状的结构；电介质层的材料选自：NaCl，KBr，CsI，CsBr，MgF2，CaF2，BaF2，LiF，AgBr，AgCl，ZnS，ZnSe，KRS-5，AMTIR1-6，Diamond，SiO2。
摘要（英）：

The invention provides a graphene plasmon device used for enhancing infrared spectrum detection. The graphene plasmon device comprises a substrate, a dielectric layer, a graphene layer, a source electrode, a drain electrode metal layer and material to be detected which are arranged from the bottom to the top in turn. The substrate also acts as a gate electrode. The dielectric layer is deposited on the substrate. The graphene layer covers the dielectric layer. The source electrode and the drain electrode metal layer are deposited on the graphene layer. The source electrode and the drain electrode metal layer are conducted by graphene. The dielectric layer is clamped between the substrate and the graphene layer. The partial region of the graphene layer between the source electrode and the drain electrode metal layer has a periodic micro-nano structure which includes multiple continuous structures with step-shaped longitudinal sections. A material layer to be detected is arranged to cover the step-shaped structures. The material of the dielectric layer is selected from NaCl, KBr, CsI, CsBr, MgF2, CaF2, BaF2, LiF, AgBr, AgCl, ZnS, ZnSe, KRS-5, AMTIR1-6, Diamond and SiO2.

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