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CN104870523B 聚酰亚胺前体、包含该聚酰亚胺前体的感光性树脂组合物、使用其的图案固化膜的制造方法和半导体装置 有权

聚酰亚胺前体、包含该聚酰亚胺前体的感光性树脂组合物、使用其的图案固化膜的制造方法和半导体装置
摘要：
一种聚酰亚胺前体，其相对于全部结构单元具有大于或等于50mol％的下述通式(1)所表示的结构单元。通式(1)中，A为下述通式(2a)～(2c)所表示的4价有机基团中的任一个，B为下述通式(3)所表示的2价有机基团。
摘要（英）：

A polyimide precursor including a structural unit represented by the following general formula (1) in a ratio of 50 mol % or more based on the total structural units. In the general formula (1), A is a tetravalent organic group represented by the following general formula (2a), a tetravalent organic group represented by the following general formula (2b), or a tetravalent organic group represented by the following general formula (2c), and B is a divalent organic group represented by the following general formula (3).

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