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发明授权
CN104333344B 微机械谐振器的振动控制方法及微机械谐振器 有权

微机械谐振器的振动控制方法及微机械谐振器
摘要：
本发明公开了种微机械谐振器的振动控制方法及微机械谐振器,包括:衬底,以及设置于衬底上的振动结构和驱动结构;其中,驱动结构用于驱动微机械谐振器的振动结构往复运动,并在振动结构往复运动的同时,生成作用在振动结构上、且促进振动结构的往复运动的促进静电力,以及生成作用在振动结构上、且制约振动结构的往复运动的制约静电力,以使得振动结构在往复运动中由静电弹簧软化效应产生的频率偏移和由静电弹簧硬化效应产生的频率偏移之间相互抵消,进而控制微机械谐振器工作在其固有频率,提高了微机械谐振器工作时的稳定性。
摘要（英）：

The invention discloses an oscillation control method for a micromechanical resonator and the micromechanical resonator. The micromechanical resonator comprises a substrate, and an oscillation structure and a driving structure which are arranged on the substrate. The driving structure is used for driving the oscillation structure of the micromechanical resonator to move in a reciprocating way, generating facilitating electrostatic force which is applied to the oscillation structure and facilitates reciprocating movement of the oscillation structure when the oscillation structure moves in the reciprocating way, and generating restricting electrostatic force which is applied to the oscillation structure and restricts reciprocating movement of the oscillation structure so that frequency deviation generated by the softening effect of an electrostatic spring and frequency deviation generated by the hardening effect of the electrostatic spring in reciprocating movement of the oscillation structure can be mutually cancelled, and thus the micromechanical resonator is controlled to work at the inherent frequency and work stability of the micromechanical resonator is enhanced.

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