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发明公开
CN104280085A 一种气体流量传感器及其制作方法 无效 - 驳回

一种气体流量传感器及其制作方法
摘要：
本发明公开了一种气体流量传感器及其制作方法，该气体流量传感器包括衬底基片、微加热电阻、上游微测温电阻、下游微测温电阻、环境电阻。衬底基片开设有凹槽，微加热电阻、上游微测温电阻、下游微测温电阻的两端均固定在衬底基片上而悬梁于凹槽上呈悬梁型结构。上、下游微测温电阻分别位于微加热电阻的相对两侧上。环境电阻固定在衬底基片上，且位于衬底基片具有上游微测温电阻的一侧上。本发明能够最大程度地避免薄膜热传导所引起的热量散失、提高微加热电阻加热效率、同时提高气体流量的检测灵敏度。本发明还公开了该气体流量传感器的制作方法。
摘要（英）：

The invention discloses a gas flow sensor and a manufacturing method thereof. The gas flow sensor comprises a substrate, micro heating resistors, upstream micro-temperature-measuring resistors, downstream micro-temperature-measuring resistors and environmental resistors, wherein a groove is formed in the substrate chip; both ends of the micro heating resistors, the upstream micro-temperature-measuring resistors and the downstream micro-temperature-measuring resistors are fixedly arranged on the substrate and hung on the groove in a suspended beam structure; the upstream micro-temperature-measuring resistors and the downstream micro-temperature-measuring resistors are respectively arranged on two opposite sides of the micro heating resistors; and the environmental resistors are fixedly arranged on the substrate and are located on one side, which is provided with the upstream micro-temperature-measuring resistors, of the substrate. The gas flow sensor disclosed by the invention can be used for avoiding the heat loss caused by heat conduction of a thin film to the maximum extent, improving the heating efficiency of the micro heating resistors and simultaneously improving the gas flow detection sensitivity. The invention further discloses the manufacturing method of the gas flow sensor.

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