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发明公开
CN103868816A QCM传感器 有权

QCM传感器
摘要：
提供一种QCM传感器，当想要在试样气氛中测定试样的物理量时，也能够高精度地检测测定试样的物理量。本发明的QCM传感器通过使试样与形成在石英振子表面的激励电极接触来检测试样的物理量，其特征在于，该QCM传感器具有：测定用石英振子，其具有作为检测对象的测定试样能够接触的第1电极和表面形成第1电极的第1石英基板；基准用石英振子，其具有作为检测测定试样的物理量时的基准的基准试样能够接触的第2电极和表面形成第2电极的第2石英基板；外壳，其收纳测定用石英振子和基准用石英振子；以及密封部，其在使基准试样与第2电极接触的状态下进行封闭。
摘要（英）：

Disclosed is a QCM sensor. The QCM sensor is capable of detecting a physical quantity of the measurement sample accurately at the time of measuring the physical quantity of the sample in an atmosphere of the sample. The QCM (Quartz Crystal Microbalance) sensor includes a quartz crystal vibrator for measurement having a first electrode which contacts a measurement sample to be detected and a first quartz substrate in which is formed the first electrode, and a quartz crystal vibrator for reference having a second electrode which contacts a reference sample serving as a reference when detecting the physical quantity of the measurement sample and a second quartz substrate in which is formed the second electrode. A housing accommodates the quartz crystal vibrators and confines the reference sample in a state of contacting the second electrode.

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