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CN103250057A 微机电类型的谐振双轴加速度计结构 有权

微机电类型的谐振双轴加速度计结构
摘要：
一种用于MEMS谐振双轴加速度计(16)的微机电检测结构(1；1′)具有：惯性质量体(2；2’)，借助弹性元件(8)固定至衬底(30)以便悬置在衬底(30)之上，弹性元件(8)响应于相应线性外部加速(ax，ay)实现惯性质量体(2；2′)的沿属于所述惯性质量体(2；2′)的主延伸的平面(xy)的第一检测轴线(x)和第二检测轴线(y)的惯性移动；以及至少一个第一谐振元件(10a)和至少一个第二谐振元件(10b)，具有分别沿第一检测轴线(x)和第二检测轴线(y)的相应纵向延伸，并且通过弹性元件(8)的相应弹性元件机械地耦合到惯性质量体(2；2’)，以便在惯性质量体分别沿第一检测轴线(x)和第二检测轴线(y)移动时经受相应的轴向应力(N1，N2)。
摘要（英）：

A microelectromechanical detection structure (1; 1') for a MEMS resonant biaxial accelerometer (16) is provided with: an inertial mass (2; 2'), anchored to a substrate (30) by means of elastic elements (8) in such a way as to be suspended above the substrate (30), the elastic elements (8) enabling inertial movements of detection of the inertial mass (2; 2') along a first axis of detection (x) and a second axis of detection (y) that belong to a plane (xy) of main extension of said inertial mass (2; 2'), in response to respective linear external accelerations (ax, ay); and at least one first resonant element (10a) and one second resonant element (10b), which have a respective longitudinal extension, respectively along the first axis of detection (x) and the second axis of detection (y), and are mechanically coupled to the inertial mass (2; 2') through a respective one of the elastic elements (8) in such a way as to undergo a respective axial stress (N1, N2) when the inertial mass moves respectively along the first axis of detection (x) and the second axis of detection (y).

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