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发明公开
CN103081059A 器件制造装置及方法 有权

器件制造装置及方法
摘要：
本发明的课题在于与器件制造的变种变量生产弹性对应。本发明是对0.5英寸的晶片进行单晶片处理方式的器件制造方法及装置，其配置多个密闭型的单位处理装置(1)而形成制造生产线，该单位处理装置(1)可搬且优选具有规格化的外形，并对制造工艺中的一个处理工艺进行处理，在该器件的制造单位数比单位处理装置的数量多的情况下，与该器件的处理工艺的顺序对应而将该单位处理装置以流水车间方式配置，在该器件的制造单位数与单位处理装置的数量同等的情况下，将该单位处理装置以按照工序的顺序的大分类而分类配置的分类车间方式配置，另外在制造单位数明显低于工序数的情况下，将该单位处理装置以多单元车间方式配置，该多单元车间方式是按照一个工艺种类而将一台左右的单位处理装置配置在一个单元内且由多个所述单元构成的方式。
摘要（英）：

To deal flexibly with variable-type variable-quantity production, in manufacturing of devices. [Solution] Provided is a device manufacturing method and an apparatus therefor, pertaining to a single-wafer processing method using 0.5 inch wafers, wherein a manufacturing line is formed by arranging a plurality of tightly-closed type unit processing apparatuses (1), each of which is portable, has preferably a standardized external-shape, and executes one process among a plurality of manufacturing processes. When the number of unit of production of the device is more than the number of unit processing apparatuses, the unit processing apparatuses are arranged with a flow-shop method in accordance with the sequence of processes to be applied to the device, and when the number of unit of production of the device is equal to the number of unit processing apparatuses, the unit processing apparatuses are arranged with a class-shop method that categorizes and arranges the unit processing apparatuses for each of the general categories of the sequence of processes. When the number of unit of production is far less than the number of processes, the unit processing apparatuses are arranged with a multi-cell shop method, wherein approximately one unit processing apparatus for one type of processing is arranged within a cell, and the manufacturing line is composed of a plurality of these cells.

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