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CN102796996A 蒸气输送装置及其制造和使用方法 有权

蒸气输送装置及其制造和使用方法
摘要：
一种方法，该方法包括将载气的第一物流传输到包括固体前体化合物的输送装置。所述载气的第一物流的温度等于或高于20℃。所述方法还包括将载气的第二物流传输到输送装置下游的位置。所述第一物流和第二物流合并，形成第三物流，使得第三物流中的所述固体前体化合物的蒸气的露点低于常温。所述第一物流的流动方向,第二物流的流动方向以及第三物流的流动方向是单向的，不是彼此反向的。
摘要（英）：

A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20 DEG C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.

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