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Invention Publication
CN102460677A 用于临时晶片接合和剥离的改进装置 失效 - 放弃专利权 转让

用于临时晶片接合和剥离的改进装置
Abstract:
一种用于临时晶片接合的改进装置，包括临时连接器群和剥离器群。临时连接器群包括临时连接器模组，其执行电子晶片接合工序，该工序包括粘胶层接合、粘胶层与释放层接合的组合和紫外光可固化粘胶层与激光吸收释放层接合的组合。剥离器群包括热滑动剥离器、机械剥离器和辐射剥离器。
Abstract(English):

An improved apparatus for temporary wafer bonding includes a temporary bonder cluster and a debonder cluster. The temporary bonder cluster includes temporary bonder modules that perform electronic wafer bonding processes including adhesive layer bonding, combination of an adhesive layer with a release layer bonding and a combination of a UV-light curable adhesive layer with a laser absorbing release layer bonding. The debonder cluster includes a thermal slide debonder, a mechanical debonder and a radiation debonder.

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