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发明公开
CN102393562A 具有与机械及电功能分离的光学功能的微机电装置 无效 - 驳回

具有与机械及电功能分离的光学功能的微机电装置
摘要：
本发明涉及具有与机械及电功能分离的光学功能的微机电装置。本发明提供一种微机电(MEMS)装置(800)，其包括具有顶表面(88)的衬底(20)、在所述衬底(20)上的可移动元件(810)及激活电极(82)。所述可移动元件(810)包括可变形层(34)及以机械方式耦合到所述可变形层(34)的反射元件(814)。所述反射元件(814)包含反射表面(92)。所述激活电极(82)与所述反射表面(92)横向地安置。所述可移动元件(810)通过在大体垂直于所述衬底(20)的所述顶表面(88)的方向上移动来对施加于所述激活电极(82)与所述可移动元件(810)之间的电压差作出响应。
摘要（英）：

In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.

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