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发明授权
CN102194991B 压电元件、压电传感器、电子设备及压电元件的制造方法 有权

压电元件、压电传感器、电子设备及压电元件的制造方法
摘要：
本发明提供一种压电元件、压电传感器、电子设备及压电元件的制造方法。压电元件包括：支撑体，具有能够沿厚度方向变位的变位部；下部电极层，形成在上述支撑体上，在平面图中，具有设置在所述变位部内的下部电极主体部以及与所述下部电极主体部连接并跨到外侧区域地设置的下部电极丝部；第一压电体层，在所述平面图中，在所述变位部内形成在所述下部电极主体部上；上部电极层，在所述平面图中，形成为跨到外侧区域，并且至少一部分层压在所述第一压电体层上且与所述下部电极层绝缘；以及第二压电体层，在所述支撑体上覆盖所述下部电极丝部的至少一部分地形成。
摘要（英）：

A piezoelectric element includes a support body having a displacing part capable of undergoing displacement, a lower electrode layer having a lower main electrode body and a lower electrode wire part with the lower main electrode body being formed on the support body and provided within the displacing part in a plan view and the lower electrode wire part being connected to the lower main electrode body and provided across an interior and an exterior of the displacing part, a first piezoelectric layer provided on the lower main electrode body, an upper electrode layer provided across the interior and exterior of the displacing part with at least a part of the upper electrode layer being layered on the first piezoelectric layer and insulated from the lower electrode layer, and a second piezoelectric layer provided on the support body to cover at least a part of the lower electrode wire part.

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