The invention discloses a thimble lifting device used for substrate processing equipment, comprising a fixation seat supporting a thimble; a positioning rod penetrates through the middle part of the fixation seat along the vertical direction; a radial clearance is arranged between the positioning rod and the fixation seat; the tail end of the positioning rod is fixedly connected with a corrugated pipe assembly; the fixation seat is evenly provided with two through holes with inner threads along a circumferential direction; a regulation screw is matched with the through hole through the thread; the lower end of the regulation screw is supported on the upper surface of the corrugated pipe assembly, thus the device can be leveled only by adjusting the regulation screw; the levelling process is simple and convenient, thus effectively shortening mean maintenance time of the device, improving the levelling range of the device, lowering the requirements of the processing and assembling precision of each component in the device, and saving the production cost. The invention also discloses the substrate processing equipment.