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发明授权
CN101937854B 衬底固持器模块和具有该衬底固持器模块的衬底装配设备 有权

衬底固持器模块和具有该衬底固持器模块的衬底装配设备
摘要：
根据本发明的衬底固持器模块包含：上部卡盘，其具备喷嘴，用于固持和固定衬底；旁路单元，其经相应地安置以与喷嘴连通且经制造以可向上和向下移动；以及压力调整单元，其连接到旁路单元，压力调整单元包括集成管，用于将旁路单元和喷嘴变换为真空状态或向旁路单元和喷嘴供应气体。根据本发明的上部卡盘的喷嘴通过旁路单元而连接到具有排气泵和气体锗存单元的压力调整单元。随后，当上部与下部衬底彼此粘附时，气体储存单元中的气体注射在上部衬底的顶部上。因而，气体的注射压力致使上部衬底紧密地粘附到下部衬底上。因此，当腔室的内部变换为大气条件以便完成所获得的粘附时，可防止在上部与下部衬底之间引入不需要的气体。
摘要（英）：

According to the present invention, a substrate holder module includes an upper clamping disc having a nozzle for holding and fixing a substrate; a bypass unit communicated with the nozzle by a corresponding arrangement and capable of moving upwards and downwards; and a pressure adjusting unit connected to the bypass unit and including a integrated tube for changing the bypass unit and the nozzleto be a vacuum state or supplying gas to the bypass unit and the nozzle. The nozzle of the upper clamping disc is connected to the pressure adjusting unit having a discharging pump and a gas storage unit through the bypass unit. When upper and lower substrates are pasted with each other, the gas stored in the gas storage unit is injected into the top part of the upper substrate. Thus, the injection pressure of the gas ensures the upper substrate to be tightly pasted to the lower substrate. Thereby, when the inner portion of the chamber is at the atmospheric condition so as to fulfill the obtained adhesion, it is possible to prevent unwanted gas from guiding between the upper and lower substrates.

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