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发明授权
CN101885959B 铈系研磨剂 失效 - 权利终止

铈系研磨剂
摘要：
本发明提供铈系研磨剂，其为将含有氧化铈的粒子的组合物分散于水中而得到的铈系研磨剂，其特征是，在6当量浓度的硝酸12.5g与30％过氧化氢溶液12.5g的混合液中溶解20g时，溶液中存在的不溶成分的浓度的质量比是10ppm以下。另外，通过减少在氧化铈粒子及其原料铈盐粒子中含有的杂质数量而提高纯度，在使用含该氧化铈粒子的铈系研磨剂进行研磨时，可以减少被研磨面上产生的擦痕。
摘要（英）：

A cerium salt which, when dissolved in an amount of 20 g in a liquid mixture of 12.5 g of 6 N nitric acid and 12.5 g of 30% aqueous hydrogen peroxide solution, gives a solution in which the concentration of insolubles present therein is up to 5 ppm by mass of the cerium salt before dissolution; and a cerium oxide obtained by treating the cerium salt with a high temperature. The amount of impurities contained in cerium oxide particles and cerium salt particles to be used as a raw material for the cerium oxide is reduced to heighten the purity. Due to the purification, when a cerium-based abrasive material containing these cerium oxide particles is used in polishing, the surface being polished can be made less apt to suffer scratching.

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