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发明授权
CN101741343B 谐振器、滤波器、以及电子装置 有权 转让

谐振器、滤波器、以及电子装置
摘要：
本发明涉及谐振器、滤波器、以及电子装置。该谐振器包括：基板；下电极；压电薄膜，设置在所述下电极上；以及上电极，设置在所述压电薄膜上。所述下电极包括设置在所述基板上的第一薄膜、以及设置在第一薄膜上并且比重大于第一薄膜的比重的第二薄膜。所述压电薄膜设置在第二薄膜上。所述上电极包括设置在所述压电薄膜上的第三薄膜、以及设置在第三薄膜上的第四薄膜，第三薄膜的比重大于第四薄膜的比重。第三薄膜比第二薄膜厚。
摘要（英）：

A resonator includes a substrate, a lower electrode, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. The lower electrode includes a first film provided on the substrate, and a second film that is provided on the first film and has a specific gravity greater than that of the first film. The piezoelectric film is provided on the second film. The upper electrode includes a third film provided on the piezoelectric film, and a fourth film provided on the third film, the third film having a specific gravity greater than that of the fourth film. The third film is thicker than the second film.

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