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发明授权
CN101393779B 具有极微细结构的光透射型金属电极及其制造方法 有权

具有极微细结构的光透射型金属电极及其制造方法
摘要：
本发明提供一种对光透明的金属电极，其是具备透明基板和具有多个开口部的金属电极层而构成的光透射型金属电极。该金属电极层无裂缝地连续，并且，未被上述开口部阻碍的连续的金属部位的直线距离小于等于所利用的可见光区域波长380nm～780nm的1/3的部位占全部面积的90％以上，平均开口部直径处于大于等于10nm、小于等于入射光的波长的1/3的范围，上述开口部的中心间间距处于大于等于平均开口部直径、小于等于入射光的波长的1/2的范围，进而上述金属电极层的膜厚处于大于等于10nm小于等于200nm的范围。
摘要（英）：

The present invention provides a metal electrode transparent to light. The metal electrode comprises a transparent substrate and a metal electrode layer composed of a metal part and plural openings. The metal electrode layer continues without breaks, and 90% or more of the metal part continues linearly without breaks by the openings in a straight length of not more than 1/3 of the visible wavelength to use in 380 nm to 780 nm. The openings have an average diameter in the range of not less than 10 nm and not more than 1/3 of the wavelength of incident light, and the pitches between the centersof the openings are not less than the average diameter and not more than 1/2 of the wavelength of incident light. The metal electrode layer has a thickness in the range of not less than 10 nm and not more than 200 nm.

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