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CN101341275A 沉积有机化合物的设备和方法以及具有该设备的基底处理装置 有权

  • Patent Title: 沉积有机化合物的设备和方法以及具有该设备的基底处理装置
  • Patent Title (English): Apparatus and method for deposition organic compounds, and substrate treating facility with the apparatus
  • Application No.: CN200680041455.1
    Application Date: 2006-11-02
  • Publication No.: CN101341275A
    Publication Date: 2009-01-07
  • Inventor: 卢一镐 , 崔硕珉 , 郑领哲
  • Applicant: 细美事有限公司
  • Applicant Address: 韩国忠清南道
  • Assignee: 细美事有限公司
  • Current Assignee: 细美事有限公司
  • Current Assignee Address: 韩国忠清南道
  • Agency: 永新专利商标代理有限公司
  • Agent 苗征; 于辉
  • Priority: 10－2005－0106023 2005.11.07 KR
  • International Application: PCT/KR2006/004534 2006.11.02
  • International Announcement: WO2007/052963 EN 2007.05.10
  • Date entered country: 2008-05-07
  • Main IPC: C23C14/12
  • IPC: C23C14/12
沉积有机化合物的设备和方法以及具有该设备的基底处理装置
Abstract:
本发明提供了沉积有机化合物的设备，以在基底上沉积预定的有机膜。该设备包括沉积室、设置在沉积室内部并且支撑基底以使基底的沉积表面朝下的支撑构件、在其中安装有有机蒸发器以将有机化合物蒸镀到基底的沉积表面上的蒸发器安装部分，以及与蒸发器安装部分相邻设置的用以更换有机蒸发器的蒸发器更换部分。根据该设备，蒸发有机化合物的有机蒸发器自动更换。
Abstract(English):

An apparatus for depositing organic compounds is provided to deposit predetermined organic films on a substrate. The apparatus includes a deposition chamber, a support member provided inside the deposition chamber and supporting the substrate to make a deposition surface of the substrate face downwardly, a vaporizer installing portion in which an organic vaporizer is installed to vaporize organiccompounds to the deposition surface of the substrate, and a vaporizer replacing portion disposed adjacent to the vaporizer installing portion to replace the organic vaporizer. According to the apparatus, organic vaporizers for vaporizing organic compounds are replaced automatically.

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