A high-accuracy measurement manner of a scanning probe microscope comprises the following steps: respectively fixing a standard sample and a sample to be detected on the upper and the lower surfaces of an xy micro-displacement mobile platform; and respectively arranging an atomic force microscope (1) and a scanning tunneling microscope (2) on and below the xy micro-displacement mobile platform (3). The scanning tunneling microscope (2) is used for recording the profile of the standard sample, and the atomic force microscope is used for recording the profile of the sample. Since the standard sample and the sample have fixed positions, the error caused by platform jitter or other vibration in the scanning process can be simultaneously represented by the profile signals of the standard sample and the sample. The standard sample is selected from a graphite sample which has a profile with periodicity, based on which the error caused by each vibration in the scanning process can be obtained. The accurate profile of the sample can be obtained by integrating the error with the profile signal of the sample.