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发明公开
CN101266222A 半导体检查系统和设备 无效 - 驳回

半导体检查系统和设备
摘要：
本发明提供一种利用非振动接触电位差传感器和可控照明的半导体检查系统和设备，用于识别半导体表面或半导体内的缺陷或污染。该方法和系统包括：提供具有表面的半导体，例如半导体晶片；提供非振动接触电位差传感器；提供具有可控的强度或波长分布的照明源；在非振动接触电位差传感器探针头下方或附近使用该照明源来提供晶片表面的可控照明；在可控照明照射时用非振动接触电位差传感器扫描晶片表面；产生代表横跨晶片表面的接触电位差变化的数据；以及处理该数据以识别缺陷或污染的图案特性。
摘要（英）：

A method and system for identifying a defect or contamination on the surface of a semiconductor or in a semiconductor. The method and system involves providing a semiconductor with a surface, such as a semiconductor wafer, providing a non-vibrating contact potential difference sensor, providing a source of illumination with controllable intensity or distribution of wavelengths, using the illumination source to provide controlled illumination of the surface of the wafer under or near the non-vibrating contact potential sensor probe tip, using the non-vibrating contact potential difference sensor to scan the wafer surface during controlled illumination, generating data representative of changes in contact potential difference across the wafer surface, and processing that data to identify a pattern characteristic of a defect or contamination.

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