知搜-全球专利检索

  1. 登录
  2. 注册
发明授权
CN101226338B 扫描曝光机校准度检测方法 有权

扫描曝光机校准度检测方法
摘要：
一种扫描曝光机校准度检测方法，包括下列步骤：选定作为标准的扫描曝光机，并调整所述的标准扫描曝光机的传输系统的精度；使用所述的标准扫描曝光机在晶片上定义出预定的标记图形，并经刻蚀工艺加工后在晶片上形成立体标记图形；用待测扫描曝光机模拟加工所述的刻有标记的晶片；根据所述的待测扫描曝光机输出的加工结果报告中的偏差值与预定的偏差允许范围判断待测扫描曝光机的校准度。本发明解决了多台扫描曝光机校准不一致时的检测问题。
摘要（英）：

A calibration detection method of scanning exposure machine comprises selecting a standard scanning exposure machine, adjusting the precision of the transmission system of the standard scanning exposure machine, using the standard scanning exposure machine to define a preset mark pattern on a chip, using etching technique to form a stereoscopic mark pattern on the chip, using an object scanning exposure machine to simulate the processing on the chip with the marks, and judging the calibration degree of the object scanning exposure machine according to the difference between the error value inthe processing result report output from the object scanning exposure machine and a preset error allowance range. The invention resolves the detection problem of multiple scanning exposure machines with un-consist calibrations.

公开/授权文献
0/0