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发明授权
CN101211112B 图案形成方法 失效 - 权利终止

图案形成方法
摘要：
本发明公开了一种图案形成方法，该图案形成方法可以改善软模与包括图案形成材料的基板之间的界面特性，该图案形成方法包括：将涂覆有图案形成材料的基板装载到腔室中；在所述腔室内，与所述基板相对地设置软模，所述软模的表面设置有凸和凹图案；通过蒸发所述图案形成材料的一些组成部分并将从所述图案形成材料中蒸发的组成部分吸附到所述软模的表面上，来形成吸附层；通过将包括所述吸附层的所述软模与剩余的图案形成材料相接触，来形成具有与所述软模的表面中所包括的所述凸和凹图案相反形状的图案层；以及将所述软模与所述图案层分离。
摘要（英）：

A method of forming a pattern is disclosed, which can improve the interfacial properties between a soft mold and a substrate including a pattern-formation material, the method comprising loading a substrate coated with a pattern-formation material into a chamber; positioning a soft mold, whose surface is provided with embossing and depressed patterns, in opposite to the substrate inside the chamber; forming an adsorption layer by evaporating some components of the pattern-formation material and adsorbing the components evaporated from the pattern-formation material to the surface of soft mold; forming a pattern layer with a shape being inverted to the embossing and depressed patterns included in the surface of soft mold by bring the soft mold including the adsorption layer into contact with the remaining pattern-formation material; and separating the soft mold from the pattern layer.

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