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发明授权
CN101107724B 压电物质元件、压电物质膜制造方法、液体排出头以及液体排出装置 失效 - 权利终止 转让

压电物质元件、压电物质膜制造方法、液体排出头以及液体排出装置
摘要：
一种压电物质元件，其在基板上具有压电物质膜和一对与所述压电物质膜连接的电极，并且所述压电物质膜的主要成分是Pb(Zr，Ti)O3，Zr/(Zr+Ti)的组成比例大于0.4但小于0.7，所述压电物质膜是至少具有四方晶体a畴和c畴的膜，所述a畴和c畴相对于所述基板表面的角度在±10°的范围内，并且c畴体积与a畴和c畴的总体积之比等于或大于20％并且等于或小于60％。
摘要（英）：

A piezoelectric substance element has a piezoelectric substance film and a pair of electrodes connected to the piezoelectric substance film on a substrate, and a main component of said piezoelectric substance film is Pb(Zr, Ti)O3, a composition ratio of Zr/(Zr+Ti) is over 0.4 but less than 0.7, the piezoelectric substance film is a film having at last a tetragonal crystal a-domain and a c-domain within a range of }10 with respect to the surface of said substrate, and a volume rate of the c-domain to the total of the a-domain and the c-domain is equal to or larger than 20% and equal to or smaller than 60%.

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