This invention discloses one hanging supportive imaging system and the light etch device with the system in the projection exposure technique field, which comprises imaging system and supportive device and is characterized by the following: it also comprises status test sensor and one active execution device, wherein, the status sensor is set on the imaging system and the active execution device is set outside imaging system connected to the sensor to receive the signals from the sensor and to correct the imaging system position; the supportive device is of hanging part down the hanging parts.