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发明授权
CN100591481C 抽水方法和抽水装置 有权

抽水方法和抽水装置
摘要：
一种晶片抛光方法，能够轻松清除附着于抛光设备的一块板上的支撑元件中包含的过量的水。在该方法中，通过如下步骤从支撑元件中除去过量的水：将吸水元件压到支撑元件的保持表面上，其中工件被粘附和保持在该表面上，以便从支撑元件中吸出过量的水；并抽出被吸水元件吸收的过量的水。此外，本发明还公开了一种相应的晶片抛光装置。
摘要（英）：

The method of sucking water is capable of easily removing excess water included in a backing member adhered on a plate of a polishing apparatus. In the method, the excess water is removed from the backing member by the steps of: pressing a water absorbing member onto a holding surface of the backing member, on which the work piece is adhered and held, so as to absorb the excess water from the backing member; and sucking the excess water absorbed by the water absorbing member.

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