公开(公告)号：US20080211041A1

公开(公告)日：2008-09-04

申请号：US11783809

申请日：2007-04-12

Applicant: Akihiko Nomura

Inventor： Akihiko Nomura

IPC: H01L29/84

CPC classification number: G01P15/123 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0842

Abstract: A micro electrical mechanical system device includes a frame portion having an upper surface with a rectangular shape; a functional element; a beam portion extending from one of sides of the frame portion toward an opposite one and having a first side surface, a second side surface opposite to the first side surface, and upper and lower surfaces between the first and second side surfaces; and a movable portion supported on the beam portion inside the frame portion to be movable. The beam portion includes a constricted portion formed in the first side surface and the second side surface along the functional element, and having a main surface and two side surfaces facing each other. The movable portion includes a center portion having four corner portions and protruding portions extending from the corner portions and away from the frame portion and the beam portion.

Abstract translation: 微电气机械系统装置包括具有矩形形状的上表面的框架部分; 功能元素 梁部分从框架部分的一侧朝向相对的一侧延伸并且具有第一侧表面，与第一侧表面相对的第二侧表面以及第一和第二侧表面之间的上表面和下表面; 以及支撑在框架部分内的梁部分上以可移动的可移动部分。 梁部分包括沿着功能元件形成在第一侧表面和第二侧表面中的收缩部分，并且具有主表面和两个彼此面对的侧表面。 可动部包括具有四个拐角部分和从角部延伸并远离框架部分和梁部分的突出部分的中心部分。