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公开(公告)号:US11895922B2
公开(公告)日:2024-02-06
申请号:US17224254
申请日:2021-04-07
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Choongho Rhee , Sungchan Kang , Yongseop Yoon
IPC: H10N30/30 , G01L1/16 , H10N30/082
CPC classification number: H10N30/302 , G01L1/16 , H10N30/082 , H10N30/306
Abstract: An etching method for forming a vertical structure is provided. The etching method may include: positioning a mask on a substrate, wherein the mask includes an opening pattern and a compensation pattern, and the compensation pattern is disposed at a corner of two adjacent sides of the opening pattern and includes a concave compensation pattern that is indented from one of the two adjacent sides; and forming the vertical structure on the substrate through the opening pattern of the mask by a dry etching process.
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公开(公告)号:US20220270615A1
公开(公告)日:2022-08-25
申请号:US17741087
申请日:2022-05-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Cheheung KIM , Sungchan Kang , Sangha Park , Yongseop Yoon , Choongho Rhee
Abstract: Provided are a method and device for recognizing a speaker by using a resonator. The method of recognizing the speaker includes receiving a plurality of electrical signals corresponding to a speech of the speaker from a plurality of resonators having different resonance bands; obtaining a difference of magnitudes of the plurality of electrical signals; and recognizing the speaker based on the difference of magnitudes of the plurality of electrical signals.
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公开(公告)号:US20210329395A1
公开(公告)日:2021-10-21
申请号:US17320988
申请日:2021-05-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Cheheung KIM , Sungchan Kang , Yongseop Yoon , Choongho Rhee , Sangha Park , Hyeokki Hong
Abstract: Provided are a directional acoustic sensor that detects a direction of sound, a method of detecting a direction of sound, and an electronic device including the directional acoustic sensor. The directional acoustic sensor includes a sound inlet through which a sound is received, a sound outlet through which the sound received through the sound inlet is output, and a plurality of vibration bodies arranged between the sound inlet and the sound outlet, in which one or more of the plurality of vibration bodies selectively react to the sound received by the sound inlet according to a direction of the received sound.
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公开(公告)号:US10823814B2
公开(公告)日:2020-11-03
申请号:US15908116
申请日:2018-02-28
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sungchan Kang , Cheheung Kim , Sangha Park , Yongseop Yoon , Choongho Rhee , Hyeokki Hong
IPC: G01S3/808 , G10K11/178 , G10K11/36 , G01S3/805
Abstract: Provided is a sound direction detection sensor capable of detecting a direction from which sound is coming by using a multi-resonator array. The disclosed sound direction detection sensor includes two resonator arrays, each including a plurality of resonators having different resonance frequencies. The two resonator arrays have different directivities. Each resonator array serves as an audio sensor, and the sound direction detection sensor detects a direction from which sound is incident, regardless of a distance between audio sensors.
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公开(公告)号:US10564197B2
公开(公告)日:2020-02-18
申请号:US15450416
申请日:2017-03-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Cheheung Kim , Sungchan Kang , Yongseop Yoon , Choongho Rhee
IPC: G01P3/42 , G01N29/14 , G01N29/24 , H04R29/00 , H01L41/053 , G01R23/16 , H03H9/24 , G01H3/08 , G01H11/08 , H04R1/24 , H04R17/02 , H04R19/00 , H04R19/04
Abstract: A spectrum analyzer includes: a support substrate; and a plurality of resonators that have center frequencies different from each other, one end of each of the plurality of resonators being fixed to the support substrate. The plurality of resonators are arranged so that an interval between resonators having adjacent center frequencies is secured by a certain value or greater, thus reducing coupling and increasing analysis accuracy.
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公开(公告)号:US11973485B2
公开(公告)日:2024-04-30
申请号:US17201576
申请日:2021-03-15
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yongseop Yoon , Sungchan Kang , Cheheung Kim , Choongho Rhee
IPC: H03H9/02
CPC classification number: H03H9/02244 , H03H9/02574 , H03H2009/02291 , H03H2009/02496
Abstract: Provided is a micromechanical resonator including a support beam including a first portion supported on a support member and a second portion spaced apart from the first portion in a length direction of the support beam, and a piezoelectric sensing portion provided between the first portion and the second portion and connecting the first portion to the second portion.
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公开(公告)号:US11955510B2
公开(公告)日:2024-04-09
申请号:US17671040
申请日:2022-02-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyeokki Hong , Cheheung Kim , Sungchan Kang , Yongseop Yoon , Choongho Rhee
IPC: H01L49/02
Abstract: A capacitor structure includes at least one first layer and at least one second layer that are alternately stacked. The at least one first layer includes first electrodes and second electrodes alternately arranged in a first direction, and the at least one second layer includes third electrodes and fourth electrodes alternately arranged in a second direction intersecting the first direction, the third electrodes and the fourth electrodes being electrically connected to the first electrodes and the second electrodes. Each of the first electrodes and the second electrodes includes a base portion and branch portions protruding from the base portion, and the third electrodes and the fourth electrodes are arranged side by side to correspond to the branch portions.
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公开(公告)号:US11887606B2
公开(公告)日:2024-01-30
申请号:US17741087
申请日:2022-05-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Cheheung Kim , Sungchan Kang , Sangha Park , Yongseop Yoon , Choongho Rhee
Abstract: Provided are a method and device for recognizing a speaker by using a resonator. The method of recognizing the speaker includes receiving a plurality of electrical signals corresponding to a speech of the speaker from a plurality of resonators having different resonance bands; obtaining a difference of magnitudes of the plurality of electrical signals; and recognizing the speaker based on the difference of magnitudes of the plurality of electrical signals.
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9.
公开(公告)号:US11112297B2
公开(公告)日:2021-09-07
申请号:US16398449
申请日:2019-04-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yongseop Yoon , Sungchan Kang , Cheheung Kim , Choongho Rhee , Hyeokki Hong
IPC: G01H11/08 , H01L41/25 , H01L41/113
Abstract: Provided are resonators, a resonator system including the resonators, and a method of manufacturing the resonators. The resonator includes a vibration beam configured to vibrate in response to an external signal, a sensing unit configured to detect the movement of the vibration beam, and a lumped mass unit including a base unit that contacts the vibration beam and a wing unit arranged separately from the vibration beam on the base unit.
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公开(公告)号:US10996250B2
公开(公告)日:2021-05-04
申请号:US16727415
申请日:2019-12-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Cheheung Kim , Sungchan Kang , Yongseop Yoon , Choongho Rhee
Abstract: A spectrum analyzer includes: a support substrate; and a plurality of resonators that have center frequencies different from each other, one end of each of the plurality of resonators being fixed to the support substrate. The plurality of resonators are arranged so that an interval between resonators having adjacent center frequencies is secured by a certain value or greater, thus reducing coupling and increasing analysis accuracy.
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