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    CAPACITANCE-BASED PRESSURE SENSOR INCLUDING PRESSURE VESSEL(S)
    2.
    发明申请
    CAPACITANCE-BASED PRESSURE SENSOR INCLUDING PRESSURE VESSEL(S) 有权
    基于电容式压力传感器，包括压力容器（S）

    公开(公告)号：US20150276532A1

    公开(公告)日：2015-10-01

    申请号：US14224535

    申请日：2014-03-25

    Applicant: Kionix, Inc.

    Inventor： Scott G. Adams

    IPC: G01L9/00 ,  H01G13/00 ,  H01G5/40

    CPC classification number: G01L9/0073 ,  G01L9/0086 ,  G01L9/0095 ,  G01L13/021 ,  G01L13/028 ,  H01G5/40 ,  H01G13/00 ,  Y10T29/43

    Abstract: Techniques are described herein that perform capacitance-based pressure sensing using pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. The void has a shape that is configured to change based on a change of pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel. The pressure vessel may be formed in the shape of an enclosed loop (e.g., along a path that is perpendicular to the cross section), resulting in a looped pressure vessel. For instance, an end of the pressure vessel may be connected to another end of the pressure vessel to form the enclosed loop.

    Abstract translation: 本文描述了使用压力容器进行基于电容的压力感测的技术。 压力容器是具有限定空隙的横截面的物体。 该空隙具有基于空腔中的空腔压力的变化而变化的形状，其中压力容器的至少一部分悬浮在其中并且压力容器内的容器压力。 压力容器可以形成为封闭环的形状（例如，沿着垂直于横截面的路径），导致环形压力容器。 例如，压力容器的一端可以连接到压力容器的另一端以形成封闭环。

    Capacitance-based pressure sensor including pressure vessel(s)
    3.
    发明授权
    Capacitance-based pressure sensor including pressure vessel(s) 有权
    电容式压力传感器，包括压力容器

    公开(公告)号：US09347846B2

    公开(公告)日：2016-05-24

    申请号：US14224535

    申请日：2014-03-25

    Applicant: Kionix, Inc.

    Inventor： Scott G. Adams

    IPC: G01L9/00 ,  H01G5/40 ,  H01G13/00 ,  G01L13/02

    CPC classification number: G01L9/0073 ,  G01L9/0086 ,  G01L9/0095 ,  G01L13/021 ,  G01L13/028 ,  H01G5/40 ,  H01G13/00 ,  Y10T29/43

    Abstract: Techniques are described herein that perform capacitance-based pressure sensing using pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. The void has a shape that is configured to change based on a change of pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel. The pressure vessel may be formed in the shape of an enclosed loop (e.g., along a path that is perpendicular to the cross section), resulting in a looped pressure vessel. For instance, an end of the pressure vessel may be connected to another end of the pressure vessel to form the enclosed loop.

    Abstract translation: 本文描述了使用压力容器进行基于电容的压力感测的技术。 压力容器是具有限定空隙的横截面的物体。 该空隙具有基于空腔中的空腔压力的变化而变化的形状，其中压力容器的至少一部分悬浮在其中并且压力容器内的容器压力。 压力容器可以形成为封闭环的形状（例如，沿着垂直于横截面的路径），导致环形压力容器。 例如，压力容器的一端可以连接到压力容器的另一端以形成封闭环。

    PRESSURE SENSOR INCLUDING DEFORMABLE PRESSURE VESSEL(S)
    4.
    发明申请
    PRESSURE SENSOR INCLUDING DEFORMABLE PRESSURE VESSEL(S) 有权
    压力传感器，包括可变压力容器（S）

    公开(公告)号：US20160061679A1

    公开(公告)日：2016-03-03

    申请号：US14474059

    申请日：2014-08-29

    Applicant: Kionix, Inc.

    Inventor： Scott G. Adams ,  Charles W. Blackmer ,  Kristin J. Lynch

    IPC: G01L9/00

    CPC classification number: G01L9/003 ,  B81B3/0072 ,  B81B2201/0264 ,  B81C1/00 ,  B81C1/00666 ,  B81C2201/0167 ,  G01L9/0027 ,  G01L9/0055 ,  G01L9/0073 ,  G01L9/008 ,  G01L9/0082 ,  G01L13/00 ,  G01L13/02 ,  G01P15/006 ,  G01P15/08 ,  H01L21/00

    Abstract: Techniques are described herein that perform pressure sensing using pressure sensor(s) that include deformable pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. A deformable pressure vessel is a pressure vessel that has at least one curved portion that is configured to structurally deform (e.g., bend, shear, elongate, etc.) based on a pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel.

    Abstract translation: 本文描述了使用包括可变形压力容器的压力传感器进行压力感测的技术。 压力容器是具有限定空隙的横截面的物体。 可变形压力容器是具有至少一个弯曲部分的压力容器，该弯曲部分构造成基于空腔中的腔体压力之间的压力差而在结构上变形（例如弯曲，剪切，细长等），其中至少一个 压力容器的一部分被悬浮并且在压力容器中存在容器压力。

    Electronic systems with through-substrate interconnects and MEMS device
    5.
    发明授权
    Electronic systems with through-substrate interconnects and MEMS device 有权

    公开(公告)号：US10829366B2

    公开(公告)日：2020-11-10

    申请号：US15941465

    申请日：2018-03-30

    Applicant: Kionix, Inc.

    Inventor： Scott G. Adams ,  Charles W. Blackmer

    IPC: H01L29/40 ,  B81B7/00 ,  B81C1/00 ,  H01L21/306 ,  H01L21/768 ,  H01L23/48 ,  H01L23/532

    Abstract: Disclosed is a method of forming an interconnect in a substrate having a first surface and a second surface. The method includes forming an insulating structure abutting the first surface and defining a closed loop around a via in the substrate and forming an insulating region abutting the second surface such that the insulating region contacts the insulating structure and separates the via from a bulk region of the substrate. Forming the insulating structure includes etching the substrate beginning from the first surface to form a trench, filling the trench to form a seam portion, and converting a first portion of the substrate to a first solid portion to form the closed loop.

    Electronic systems with through-substrate interconnects and MEMS device
    6.
    发明授权
    Electronic systems with through-substrate interconnects and MEMS device 有权

    公开(公告)号：US10315915B2

    公开(公告)日：2019-06-11

    申请号：US14790378

    申请日：2015-07-02

    Applicant: Kionix, Inc.

    Inventor： Scott G. Adams ,  Charles W. Blackmer

    IPC: B81B7/00 ,  B81C1/00 ,  H01L21/306 ,  H01L21/768 ,  H01L23/48 ,  H01L23/532

    Abstract: Disclosed are systems, methods, and computer program products for electronic systems with through-substrate interconnects and mems device. An interconnect formed in a substrate having a first surface and a second surface, the interconnect includes: a bulk region; a via extending from the first surface to the second surface; an insulating structure extending through the first surface into the substrate and defining a closed loop around the via, wherein the insulating structure comprises a seam portion separated by at least one solid portion; and an insulating region extending from the insulating structure toward the second surface, the insulating region separating the via from the bulk region, wherein the insulating structure and insulating region collectively provide electrical isolation between the via and the bulk region.

    SINGLE MOTOR DYNAMIC CALIBRATION UNIT
    7.
    发明申请
    SINGLE MOTOR DYNAMIC CALIBRATION UNIT 有权
    单电机动态校准单元

    公开(公告)号：US20140245810A1

    公开(公告)日：2014-09-04

    申请号：US13783606

    申请日：2013-03-04

    Applicant: Kionix, Inc.

    Inventor： Nathan L. STIRLING ,  Luke E. DeWalt ,  James E. Strait ,  Scott G. Adams

    IPC: G01D18/00 ,  G01B21/00

    CPC classification number: B81C99/005

    Abstract: A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.

    Abstract translation: 提供了用于校准被测器件的校准单元，系统和方法。 校准单元，系统和方法使用单轴旋转单元在测试头上校准被测器件。 单轴旋转单元构造成从已知轴线以一定角度延伸。 测试头可以设计成具有多边的截头锥体的形状。 校准单元，系统和方法可以使用重力激励，亥姆霍兹线圈激励和旋转速率激励的组合来校准被测器件。 校准单元，系统和方法可以自由地校准3度或更高的MEMS器件。

    Single motor dynamic calibration unit
    10.
    发明授权
    Single motor dynamic calibration unit 有权

    公开(公告)号：US09751757B2

    公开(公告)日：2017-09-05

    申请号：US13783606

    申请日：2013-03-04

    Applicant: Kionix, Inc.

    Inventor： Nathan L. Stirling ,  Luke E. DeWalt ,  James E. Strait ,  Scott G. Adams

    IPC: G01B21/00 ,  B81C99/00

    CPC classification number: B81C99/005

    Abstract: A calibration unit, system, and method for calibrating a device under test are provided. The calibration unit, system, and method use a single axis rotational unit to calibrate devices under test on a test head. The single axis rotation unit is configured to extend at an angle from a known axis. The test head can be designed in the shape of a frustum with multiple sides. The calibration unit, system, and method can use combinations of gravitational excitation, Helmholtz coil excitation, and rotational rate excitation for calibrating the device under test. The calibration unit, system, and method can calibrate a 3 degree for freedom or higher MEMS devices.

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