Photocathode having ultra-thin protective layer
    3.
    发明授权
    Photocathode having ultra-thin protective layer 失效
    光电阴极具有超薄的保护层

    公开(公告)号:US06674235B2

    公开(公告)日:2004-01-06

    申请号:US10112888

    申请日:2002-04-01

    IPC分类号: H01J4006

    CPC分类号: H01J1/34 H01J40/06

    摘要: A photocathode structure having a photoelectric face plate protective layer, in order to prevent a photoelectric effect from being deteriorated sharply due to a high reaction of oxygen with respect to most of existing photoelectric face plate materials when the photoelectric face plate used for generating photoelectrons by a photoelectric effect is exposed to the atmosphere, is provided. For example, a diamond-like carbon thin layer is used as a photocathode protective layer, to thereby perform a function of protection of the photoelectric face plate through isolation of the photoelectric face plate from the atmosphere and enable electrons generated from the photoelectric face plate to pass through a diamond-like carbon thin layer, which is deposited thinly, by the tunneling effect so that the performance of the photocathode is not affected. By using the protective layer, the processes subsequent to the photoelectric face plate deposition process can be freely performed in the atmosphere, to thereby simplify the whole process. As a result, a production cost is lowered, and manufacturing of a device or apparatus using a large-are photocathode is facilitated.

    摘要翻译: 一种具有光电面板保护层的光电阴极结构,为了防止光电效应由于氧气相对于大多数现有光电面板材料而产生的高反应,当用于通过光电面板产生光电子的光电面板 提供光电效应暴露在大气中。 例如,使用类金刚石碳薄膜作为光电阴极保护层,由此通过将光电面板与大气隔离来实现保护光电面板的功能,并且能够使从光电面板产生的电子 通过通过隧道效应薄沉积的类金刚石碳薄层,使得光电阴极的性能不受影响。 通过使用保护层,可以在大气中自由进行光电面板沉积处理之后的处理,从而简化整个处理。 结果,降低了制造成本,并且促进了使用大的光电阴极的装置或装置的制造。