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    Thermal isolation structures for microactuators
    1.
    发明授权
    Thermal isolation structures for microactuators 失效
    微型制动器的隔热结构

    公开(公告)号：US5529279A

    公开(公告)日：1996-06-25

    申请号：US295127

    申请日：1994-08-24

    Applicant: Christopher C. Beatty ,  James W. Baker

    Inventor： Christopher C. Beatty ,  James W. Baker

    IPC: F16K31/66 ,  B81B3/00 ,  F15C5/00 ,  F16K31/64 ,  F16K99/00 ,  G05D7/03 ,  H01L21/306 ,  F16K31/02 ,  F03G7/06

    CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0009 ,  F16K99/0044 ,  F16K2099/0074 ,  F16K2099/008

    Abstract: A microactuator preferably in the form of a microminiature valve for controlling the flow of a fluid carried by a flow channel includes a first substrate having a thermally-actuated member selectively operated by a thermal actuator such that the first substrate thereby develops thermal energy, and a second substrate having opposed first and second major surfaces. The second substrate is attached to the first substrate at the first major surface. The second major surface defines an isolation cell for enclosing a volume when the second substrate is attached to the support to thereby reduce the thermal mass of the microactuator and to thermally isolate the first substrate from the support.

    Abstract translation: 用于控制由流动通道承载的流体的流动的微型致动器的微致动器包括具有由热致动器选择性地操作的热致动构件的第一基板，从而使第一基板产生热能，并且 第二基板具有相对的第一和第二主表面。 第二基板在第一主表面附接到第一基板。 第二主表面限定了当第二衬底附接到支撑件时用于封闭体积的隔离室，从而减小微致动器的热质量并且将第一衬底与支撑件热隔离。

    Method for forming tungsten structures in a semiconductor
    6.
    发明授权
    Method for forming tungsten structures in a semiconductor 失效
    在半导体中形成钨结构的方法

    公开(公告)号：US4925524A

    公开(公告)日：1990-05-15

    申请号：US293550

    申请日：1989-01-04

    Applicant: Christopher C. Beatty

    Inventor： Christopher C. Beatty

    IPC: H01L21/3213 ,  H01L21/768 ,  H01L23/482

    CPC classification number: H01L21/76886 ,  H01L21/32136 ,  H01L23/4827 ,  H01L2924/0002

    Abstract: A method and system for forming tungsten structures in a semiconductor device which uses a chromium protective layer to protect underlying semiconductor layers during the etching process and a chromium mask layer so that tungsten structures can be formed with high aspect ratios using a reactive ion etching to etch the tungsten with a carbon tetrafluoride oxygen plasma in a reactive ion etcher. Long overetches can be achieved because of the high selectivity of chromium to the carbon tetrafluoride/oxygen plasma. The anisotropic nature of the reactive ion etcher prevents undercut during long overetches of the tungsten to further decrease losses in linewidth or increases in resistance as a result of overetching.

    Abstract translation: 一种用于在半导体器件中形成钨结构的方法和系统，其使用铬保护层来在蚀刻过程期间保护下面的半导体层和铬掩模层，使得可以使用反应离子蚀刻蚀刻来形成具有高纵横比的钨结构 在反应离子蚀刻剂中具有四氟化碳氧等离子体的钨。 由于铬对四氟化碳/氧等离子体的高选择性，可以实现长时间的老化。 反应离子蚀刻器的各向异性特性防止在钨的长时间过蚀刻过程中的底切，以进一步降低线宽的损失或由于过蚀刻导致的电阻增加。

    Method of detecting analytes in a microfluidic sample and a system for performing the same
    7.
    发明授权
    Method of detecting analytes in a microfluidic sample and a system for performing the same 有权
    检测微流体样品中的分析物的方法和用于进行微流体样品的系统

    公开(公告)号：US07384798B2

    公开(公告)日：2008-06-10

    申请号：US11590263

    申请日：2006-10-31

    Applicant: Philip H. Harding ,  Christopher C. Beatty ,  Kenneth J. Ward

    Inventor： Philip H. Harding ,  Christopher C. Beatty ,  Kenneth J. Ward

    IPC: G01N33/553

    CPC classification number: G01N33/54313 ,  B01F13/0059 ,  B01F15/0201 ,  B01F15/0233 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0803 ,  B01L2300/0816 ,  B01L2300/0864 ,  B01L2300/0867 ,  B01L2400/0409 ,  B01L2400/043 ,  B03C1/01 ,  G01N33/5432

    Abstract: A method of detecting analytes in a microfluidic sample includes introducing at least one type of analyte, at least one type of carrier particle, and a fluid into a mixing chamber of a system. The at least one type of analyte binds to a site on the at least one type of carrier particle to form a microfluidic suspension including at least one analyte-bound particle suspended in the fluid. The at least one analyte-bound particle is separated from the fluid by exposing the suspension to physical forces, magnetic forces, or combinations thereof. A spectrophotometric property of a solution is altered using the at least one analyte-bound particle. The altered spectrophotometric property is measured with an optical detection system.

    Abstract translation: 检测微流体样品中的分析物的方法包括将至少一种类型的分析物，至少一种类型的载体颗粒和流体引入系统的混合室中。 所述至少一种类型的分析物结合至少一种类型的载体颗粒上的位点以形成包含悬浮在流体中的至少一种分析物结合颗粒的微流体悬浮液。 通过将悬浮液暴露于物理力，磁力或其组合，使至少一种分析物结合的颗粒与流体分离。 使用至少一种分析物结合的颗粒来改变溶液的分光光度特性。 用光学检测系统测量改变的分光光度特性。

    Pump apparatus
    9.
    发明授权
    Pump apparatus 失效
    泵装置

    公开(公告)号：US5129794A

    公开(公告)日：1992-07-14

    申请号：US754172

    申请日：1991-08-26

    Applicant: Christopher C. Beatty

    Inventor： Christopher C. Beatty

    IPC: F04B43/02 ,  F04B43/04 ,  F15C5/00

    CPC classification number: F15C5/00 ,  F04B43/02 ,  F04B43/043

    Abstract: A pump apparatus comprising an enclosure for holding a volume of fluid; an intake one-way valve for enabling intake of fluid into the enclosure; a discharge one-way valve for enabling discharge of fluid from the enclosure; a diaphragm for cyclically deflectably increasing and decreasing the volume of the enclosure whereby fluid is oscillatingly drawn into the enclosure and discharged therefrom; a heating assembly for selectively oscillatingly applying heat to the diaphragm and terminating application of heat thereto for selectively oscillatingly deflecting the diaphragm.

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