公开(公告)号：US20210265134A1

公开(公告)日：2021-08-26

申请号：US17157224

申请日：2021-01-25

Applicant: Applied Materials, Inc.

Inventor： Saravjeet Singh ,  Kenneth D. Schatz ,  Alan Tso ,  Marlin Wijekoon ,  Dimitri Kioussis

IPC: H01J37/32 ,  H01L21/02

Abstract: The present technology includes improved gas distribution designs for forming uniform plasmas during semiconductor processing operations or for treating the interior of semiconductor processing chambers. While conventional gas distribution assemblies may receive a specific reactant or reactant ratio which is then distributed into the plasma region, the presently described technology allows for improved control of the reactant input distribution. The technology allows for separate flows of reactants to different regions of the plasma to offset any irregularities observed in process uniformity. A first precursor may be delivered to the center of the plasma above the center of the substrate/pedestal while a second precursor may be delivered to an outer portion of the plasma above an outer portion of the substrate/pedestal. In so doing, a substrate residing on the pedestal may experience a more uniform etch or deposition profile across the entire surface.

公开(公告)号：US20190043727A1

公开(公告)日：2019-02-07

申请号：US16056001

申请日：2018-08-06

Applicant: Applied Materials, Inc.

Inventor： Mikhail Korolik ,  Nitin Ingle ,  Dimitri Kioussis

IPC: H01L21/3065

Abstract: Exemplary methods for etching a germanium-containing material may include forming a plasma of a fluorine-containing precursor in a remote plasma region of a semiconductor processing chamber. The methods may include flowing effluents of the fluorine-containing precursor through apertures defined in a chamber component. The apertures may be coated with a catalytic material. The methods may include reducing a concentration of fluorine radicals in the plasma effluents with the catalytic material. The methods may also include delivering the plasma effluents to a processing region of the semiconductor processing chamber. A substrate having an exposed region of a germanium-containing material may be housed within the processing region. The methods may further include etching the germanium-containing material.

公开(公告)号：US11581165B2

公开(公告)日：2023-02-14

申请号：US17157224

申请日：2021-01-25

Applicant: Applied Materials, Inc.

Inventor： Saravjeet Singh ,  Kenneth D. Schatz ,  Alan Tso ,  Marlin Wijekoon ,  Dimitri Kioussis

IPC: H01J37/32 ,  H01L21/02 ,  H01L21/311

Abstract: The present technology includes improved gas distribution designs for forming uniform plasmas during semiconductor processing operations or for treating the interior of semiconductor processing chambers. While conventional gas distribution assemblies may receive a specific reactant or reactant ratio which is then distributed into the plasma region, the presently described technology allows for improved control of the reactant input distribution. The technology allows for separate flows of reactants to different regions of the plasma to offset any irregularities observed in process uniformity. A first precursor may be delivered to the center of the plasma above the center of the substrate/pedestal while a second precursor may be delivered to an outer portion of the plasma above an outer portion of the substrate/pedestal. In so doing, a substrate residing on the pedestal may experience a more uniform etch or deposition profile across the entire surface.

公开(公告)号：US10593553B2

公开(公告)日：2020-03-17

申请号：US16056001

申请日：2018-08-06

Applicant: Applied Materials, Inc.

Inventor： Mikhail Korolik ,  Nitin Ingle ,  Dimitri Kioussis

IPC: H01L21/306 ,  H01L21/3065 ,  H01J37/32

Abstract: Exemplary methods for etching a germanium-containing material may include forming a plasma of a fluorine-containing precursor in a remote plasma region of a semiconductor processing chamber. The methods may include flowing effluents of the fluorine-containing precursor through apertures defined in a chamber component. The apertures may be coated with a catalytic material. The methods may include reducing a concentration of fluorine radicals in the plasma effluents with the catalytic material. The methods may also include delivering the plasma effluents to a processing region of the semiconductor processing chamber. A substrate having an exposed region of a germanium-containing material may be housed within the processing region. The methods may further include etching the germanium-containing material.

公开(公告)号：US10177227B1

公开(公告)日：2019-01-08

申请号：US15687747

申请日：2017-08-28

Applicant: Applied Materials, Inc.

Inventor： Naomi Yoshida ,  Lin Dong ,  Shiyu Sun ,  Myungsun Kim ,  Nam Sung Kim ,  Dimitri Kioussis ,  Mikhail Korolik ,  Gaetano Santoro ,  Vanessa Pena

IPC: H01L21/02 ,  H01L29/06 ,  H01L29/417 ,  H01L29/786 ,  H01L29/66 ,  H01L29/423 ,  H01L29/78

Abstract: The present disclosure provides methods for forming horizontal gate-all-around (hGAA) structure devices. In one example, a method includes selectively and laterally etching a first group of sidewalls of a first layer in a multi-material layer, wherein the multi-material layer comprises repeating pairs of the first layer and a second layer, the first and the second layers having the first group and a second group of sidewalls respectively, the first group of sidewalls from the first layer exposed through openings defined in the multi-material layer and a group of inner spacers formed atop of the second group of sidewalls from the second layer, forming a recess from the first group of sidewalls of the first layer and defining a vertical wall inward from an outer vertical surface of the inner spacer formed atop of the second layers, and forming an epi-silicon layer from the recess of the first layer.

公开(公告)号：US20230197416A1

公开(公告)日：2023-06-22

申请号：US18168467

申请日：2023-02-13

Applicant: Applied Materials, Inc.

Inventor： Saravjeet Singh ,  Kenneth D. Schatz ,  Alan Tso ,  Marlin Wijekoon ,  Dimitri Kioussis

IPC: H01J37/32 ,  H01L21/02

CPC classification number: H01J37/32449 ,  H01J37/32862 ,  H01L21/02049 ,  H01L21/31116

Abstract: The present technology includes improved gas distribution designs for forming uniform plasmas during semiconductor processing operations or for treating the interior of semiconductor processing chambers. While conventional gas distribution assemblies may receive a specific reactant or reactant ratio which is then distributed into the plasma region, the presently described technology allows for improved control of the reactant input distribution. The technology allows for separate flows of reactants to different regions of the plasma to offset any irregularities observed in process uniformity. A first precursor may be delivered to the center of the plasma above the center of the substrate/pedestal while a second precursor may be delivered to an outer portion of the plasma above an outer portion of the substrate/pedestal. In so doing, a substrate residing on the pedestal may experience a more uniform etch or deposition profile across the entire surface.

公开(公告)号：US20190189401A1

公开(公告)日：2019-06-20

申请号：US15847411

申请日：2017-12-19

Applicant: Applied Materials, Inc.

Inventor： Saravjeet Singh ,  Kenneth D. Schatz ,  Alan Tso ,  Marlin Wijekoon ,  Dimitri Kioussis

IPC: H01J37/32 ,  H01L21/02

CPC classification number: H01J37/32449 ,  H01J37/32862 ,  H01J2237/3323 ,  H01J2237/3344 ,  H01J2237/335 ,  H01L21/02049 ,  H01L21/02274 ,  H01L21/31116

Abstract: The present technology includes improved gas distribution designs for forming uniform plasmas during semiconductor processing operations or for treating the interior of semiconductor processing chambers. While conventional gas distribution assemblies may receive a specific reactant or reactant ratio which is then distributed into the plasma region, the presently described technology allows for improved control of the reactant input distribution. The technology allows for separate flows of reactants to different regions of the plasma to offset any irregularities observed in process uniformity. A first precursor may be delivered to the center of the plasma above the center of the substrate/pedestal while a second precursor may be delivered to an outer portion of the plasma above an outer portion of the substrate/pedestal. In so doing, a substrate residing on the pedestal may experience a more uniform etch or deposition profile across the entire surface.

公开(公告)号：US10043674B1

公开(公告)日：2018-08-07

申请号：US15669362

申请日：2017-08-04

Applicant: Applied Materials, Inc.

Inventor： Mikhail Korolik ,  Nitin Ingle ,  Dimitri Kioussis

IPC: H01L21/3065 ,  H01L21/306

CPC classification number: H01L21/3065 ,  H01J37/32357 ,  H01J37/32422 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32477

Abstract: Exemplary methods for etching a germanium-containing material may include forming a plasma of a fluorine-containing precursor in a remote plasma region of a semiconductor processing chamber. The methods may include flowing effluents of the fluorine-containing precursor through apertures defined in a chamber component. The apertures may be coated with a catalytic material. The methods may include reducing a concentration of fluorine radicals in the plasma effluents with the catalytic material. The methods may also include delivering the plasma effluents to a processing region of the semiconductor processing chamber. A substrate having an exposed region of a germanium-containing material may be housed within the processing region. The methods may further include etching the germanium-containing material.

公开(公告)号：US12148597B2

公开(公告)日：2024-11-19

申请号：US18168467

申请日：2023-02-13

Applicant: Applied Materials, Inc.

Inventor： Saravjeet Singh ,  Kenneth D. Schatz ,  Alan Tso ,  Marlin Wijekoon ,  Dimitri Kioussis

IPC: H01L21/02 ,  H01J37/32 ,  H01L21/311

Abstract: The present technology includes improved gas distribution designs for forming uniform plasmas during semiconductor processing operations or for treating the interior of semiconductor processing chambers. While conventional gas distribution assemblies may receive a specific reactant or reactant ratio which is then distributed into the plasma region, the presently described technology allows for improved control of the reactant input distribution. The technology allows for separate flows of reactants to different regions of the plasma to offset any irregularities observed in process uniformity. A first precursor may be delivered to the center of the plasma above the center of the substrate/pedestal while a second precursor may be delivered to an outer portion of the plasma above an outer portion of the substrate/pedestal. In so doing, a substrate residing on the pedestal may experience a more uniform etch or deposition profile across the entire surface.

公开(公告)号：US12131913B2

公开(公告)日：2024-10-29

申请号：US18206037

申请日：2023-06-05

Applicant: Applied Materials, Inc.

Inventor： Krishna Nittala ,  Sarah Michelle Bobek ,  Kwangduk Douglas Lee ,  Ratsamee Limdulpaiboon ,  Dimitri Kioussis ,  Karthik Janakiraman

IPC: H01L21/308 ,  H01L21/3065 ,  H01L21/324 ,  H01L21/67

CPC classification number: H01L21/3081 ,  H01L21/3065 ,  H01L21/324 ,  H01L21/67069 ,  H01L21/67115 ,  H01L21/67207

Abstract: Aspects generally relate to methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers. In one aspect, film stress is altered while facilitating enhanced etch selectivity. In one implementation, a method of processing a substrate includes depositing one or more amorphous carbon hardmask layers onto the substrate, and conducting a rapid thermal anneal operation on the substrate after depositing the one or more amorphous carbon hardmask layers. The rapid thermal anneal operation lasts for an anneal time that is 60 seconds or less. The rapid thermal anneal operation includes heating the substrate to an anneal temperature that is within a range of 600 degrees Celsius to 1,000 degrees Celsius. The method includes etching the substrate after conducting the rapid thermal anneal operation.