公开(公告)号：US20220155675A1

公开(公告)日：2022-05-19

申请号：US17433038

申请日：2020-02-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Ilya MALAKHOVSKY ,  Derk Servatius Gertruda BROUNS ,  Joffrey Rene Sylvian CRAQUELIN ,  Edward HAGE ,  Pieter Renaat Maria HENNUS ,  Jan Willem Adriaan OOSTERLING ,  Ludolf POSTMA ,  Marcel Duco SNEL ,  Johannes Charles Adrianus VAN DEN BERG ,  Wouter VAN DER CHIJS ,  Bartel Joris VAN DER VEEK ,  Mike Johannes Antonius VAN KUIJK ,  Marina Antoinetta Leonarda VAN UUM-VAN HERK ,  Henricus Marinus Theodorus WIERSMA

IPC: G03F1/64 ,  G03F7/20 ,  G03F1/24

Abstract: An object handling apparatus for handling a generally planar object, the object handling apparatus including: two support arms, at least one of the two support arms movable relative to another support arm generally in a plane such that the two support arms are operable to grip and hold an object disposed in the plane, wherein each of the support arms includes at least one support pad and at least one aligner, the support pads configured to locally contact a surface of the object and apply a force thereto generally perpendicular to the plane so as to support the object and the at least one aligner configured to locally contact a surface of the object and apply a force thereto generally in the plane so as to grip the object.