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1.发明申请公开(公告)号：US20210100141A1
公开(公告)日：2021-04-01
申请号：US16890336
申请日：2020-06-02
Applicant: APPLIED MATERIALS, INC.
Inventor： Gayatri Natu , Geetika Bajaj , Prerna Goradia , Darshan Thakare , David Fenwick , XiaoMing He , Sanni Seppaelae , Jennifer Sun , Rajkumar Thanu , Jeff Hudgens , Karuppasamy Muthukamatchy , Arun Dhayalan
Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.
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2.发明授权公开(公告)号：US12004337B2
公开(公告)日：2024-06-04
申请号：US17985065
申请日：2022-11-10
Applicant: Applied Materials, Inc.
Inventor： Gayatri Natu , Geetika Bajaj , Prerna Goradia , Darshan Thakare , David Fenwick , XiaoMing He , Sanni Seppaelae , Jennifer Sun , Rajkumar Thanu , Jeff Hudgens , Karuppasamy Muthukamatchy , Arun Dhayalan
IPC: H05K9/00 , H01J37/20 , H01J37/32 , H01L21/687 , H05F1/02
CPC classification number: H05K9/0064 , H01J37/20 , H01J37/32477 , H01J37/32495 , H01L21/68707 , H01L21/68757 , H05F1/02
Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.
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3.发明授权公开(公告)号：US11547030B2
公开(公告)日：2023-01-03
申请号：US16890346
申请日：2020-06-02
Applicant: APPLIED MATERIALS, INC.
Inventor： Gayatri Natu , Geetika Bajaj , Prerna Goradia , Darshan Thakare , David Fenwick , XiaoMing He , Sanni Seppaelae , Jennifer Sun , Rajkumar Thanu , Jeff Hudgens , Karuppasamy Muthukamatchy , Arun Dhayalan
Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.
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Patent Agency Ranking
公开(公告)号：US20220351960A1
公开(公告)日：2022-11-03
申请号：US17347789
申请日：2021-06-15
Applicant: Applied Materials, Inc.
Inventor： Lisa J. Enman , Mark Saly , Sanni Seppaelae , Gayatri Natu
IPC: H01L21/02 , C23C16/455 , C23C16/30 , C23C16/56
Abstract: Methods and precursors for depositing metal fluoride films on a substrate surface are described. The method includes exposing the substrate surface to a metal precursor and a fluoride precursor. The fluoride precursor is volatile at a temperature in a range of from 20° C. to 200° C. The metal precursor reacts with the fluoride precursor to form a non-volatile metal fluoride film.
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5.发明公开公开(公告)号：US20240284650A1
公开(公告)日：2024-08-22
申请号：US18648278
申请日：2024-04-26
Applicant: APPLIED MATERIALS, INC.
Inventor： Gayatri Natu , Geetika Bajaj , Prerna Goradia , Darshan Thakare , David Fenwick , XiaoMing He , Sanni Seppaelae , Jennifer Sun , Rajkumar Thanu , Jeff Hudgens , Karuppasamy Muthukamatchy , Arun Dhayalan
IPC: H05K9/00 , H01J37/20 , H01J37/32 , H01L21/687 , H05F1/02
CPC classification number: H05K9/0064 , H01J37/20 , H01J37/32477 , H01J37/32495 , H01L21/68707 , H01L21/68757 , H05F1/02
Abstract: A coated chamber component comprises a chamber component and a coating deposited on a surface of the chamber component, the coating comprising an electrically-dissipative material. The electrically-dissipative material is to provide a dissipative path from the coating to a ground. The coating is uniform, conformal, and has a thickness ranging from about 10 nm to about 900 nm.
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6.发明申请公开(公告)号：US20230077895A1
公开(公告)日：2023-03-16
申请号：US17985065
申请日：2022-11-10
Applicant: Applied Materials, Inc.
Inventor： Gayatri Natu , Geetika Bajaj , Prerna Goradia , Darshan Thakare , David Fenwick , XiaoMing He , Sanni Seppaelae , Jennifer Sun , Rajkumar Thanu , Jeff Hudgens , Karuppasamy Muthukamatchy , Arun Dhayalan
Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.
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7.发明授权公开(公告)号：US11540432B2
公开(公告)日：2022-12-27
申请号：US16890336
申请日：2020-06-02
Applicant: APPLIED MATERIALS, INC.
Inventor： Gayatri Natu , Geetika Bajaj , Prerna Goradia , Darshan Thakare , David Fenwick , XiaoMing He , Sanni Seppaelae , Jennifer Sun , Rajkumar Thanu , Jeff Hudgens , Karuppasamy Muthukamatchy , Arun Dhayalan
Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.
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8.发明申请公开(公告)号：US20210100087A1
公开(公告)日：2021-04-01
申请号：US16890346
申请日：2020-06-02
Applicant: APPLIED MATERIALS, INC.
Inventor： Gayatri Natu , Geetika Bajaj , Prerna Goradia , Darshan Thakare , David Fenwick , XiaoMing He , Sanni Seppaelae , Jennifer Sun , Rajkumar Thanu , Jeff Hudgens , Karuppasamy Muthukamatchy , Arun Dhayalan
IPC: H05F1/02 , H01L21/687 , H01J37/32 , B25J18/00
Abstract: Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.
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