公开(公告)号：US20160265910A1

公开(公告)日：2016-09-15

申请号：US14772115

申请日：2014-07-30

Applicant: HALLIBURTON ENERGY SERVICES, INC.

Inventor： James M. Price ,  David L. Perkins ,  Robert Atkinson ,  Li Gao

IPC: G01B17/02 ,  G01N29/46 ,  G01N29/24

CPC classification number: G01B17/02 ,  G01B11/06 ,  G01B17/025 ,  G01N21/211 ,  G01N21/84 ,  G01N29/043 ,  G01N29/2418 ,  G01N29/2462 ,  G01N29/46 ,  G01N2291/0237 ,  G01N2291/02854 ,  G01N2291/0423

Abstract: Systems and methods of in-situ measuring the physical properties of an integrated computational element (ICE) device using surface acoustic wave (SAW) spectroscopy during fabrication are provided. The system includes a measurement device having a pump source providing an excitation pulse generating a SAW on the outer surface of the ICE. The system provides a probe radiation to be interacted with the outer surface of the ICE device and to form an interacted radiation, and an optical transducer configured to receive the interacted radiation and form a signal. An analyzer receives the signal from the optical transducer and determines a property of a material layer on the outer surface of the ICE device, and a second measurement device using at least one of optical monitoring, ellipsometry, and optical spectroscopy, is configured to measure a second property in the ICE device.

Abstract translation: 提供了在制造期间使用表面声波（SAW）光谱原位测量集成计算元件（ICE）器件的物理性质的系统和方法。 该系统包括具有泵源的测量装置，其在ICE的外表面上提供产生SAW的激励脉冲。 该系统提供探针辐射以与ICE装置的外表面相互作用并形成相互作用的辐射，以及配置成接收相互作用的辐射并形成信号的光学换能器。 分析仪接收来自光学换能器的信号，并且确定ICE装置的外表面上的材料层的性质，并且使用光学监视，椭偏仪和光谱学中的至少一个的第二测量装置被配置为测量 ICE设备中的第二个属性。

公开(公告)号：US20160260612A1

公开(公告)日：2016-09-08

申请号：US14428722

申请日：2014-04-24

Applicant: HALLIBURTON ENERGY SERVICES, INC.

Inventor： James M. Price ,  Aditya B. Nayak ,  David L. Perkins

IPC: H01L21/265 ,  H01L21/67 ,  G01B11/06 ,  C23C14/16 ,  C23C14/18 ,  H01J37/317 ,  H01L21/66 ,  C23C14/48

CPC classification number: H01L21/265 ,  C23C14/0042 ,  C23C14/0641 ,  C23C14/16 ,  C23C14/18 ,  C23C14/221 ,  C23C14/48 ,  G01B11/0625 ,  G01B11/0683 ,  G02B5/285 ,  H01J37/3171 ,  H01L21/67213 ,  H01L21/67253 ,  H01L22/34

Abstract: Systems and methods of engineering the optical properties of an optical Integrated Computational Element device using ion implantation during fabrication are provided. A system as disclosed herein includes a chamber, a material source contained within the chamber, an ion source configured to provide a high-energy ion beam, a substrate holder to support a multilayer stack of materials that form the Integrated Computational Element device, a measurement system, and a computational unit. The material source provides a material layer to the multilayer stack, and at least a portion of the ion beam is deposited in the material layer according to an optical value provided by the measurement system.

Abstract translation: 提供了在制造期间使用离子注入来设计光学集成计算元件装置的光学特性的系统和方法。 本文公开的系统包括室，容纳在室内的材料源，被配置为提供高能量离子束的离子源，用于支撑形成集成计算元件装置的材料的多层堆叠的衬底保持器，测量 系统和计算单元。 材料源为多层堆叠提供材料层，并且离子束的至少一部分根据由测量系统提供的光学值沉积在材料层中。