Heat dissipation for heat generating element of semiconductor device and related method
    82.
    发明授权
    Heat dissipation for heat generating element of semiconductor device and related method 有权
    半导体器件发热元件的散热及相关方法

    公开(公告)号:US07166913B2

    公开(公告)日:2007-01-23

    申请号:US10907873

    申请日:2005-04-19

    CPC classification number: H01L23/5228 H01L23/3677 H01L2924/0002 H01L2924/00

    Abstract: A structure and method are disclosed for heat dissipation relative to a heat generating element in a semiconductor device. The structure includes a plurality of heat transmitting lines partially vertically coincidental with the heat generating element, and at least one interconnecting path from each heat transmitting line to a substrate of the semiconductor device. In one embodiment, the heat generating element includes a resistor in a non-first metal level. The invention is compatible with conventional BEOL interconnect schemes, minimizes the amount of heat transfer from the resistor to the surrounding interconnect wiring, thus eliminating the loss of current carrying capability in the wiring.

    Abstract translation: 公开了相对于半导体器件中的发热元件的散热的结构和方法。 该结构包括多个与发热元件垂直一致的传热线,以及从每个传热线到半导体器件的基板的至少一个互连路径。 在一个实施例中,发热元件包括非第一金属水平的电阻器。 本发明与传统的BEOL互连方案兼容,使得从电阻器到周围互连布线的传热量最小化,从而消除了布线中的载流能力的损失。

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