公开(公告)号：US08048230B2

公开(公告)日：2011-11-01

申请号：US12271277

申请日：2008-11-14

申请人： Michael Long ,  Thomas W. Palone

发明人： Michael Long ,  Thomas W. Palone

IPC分类号： C23C16/448 ,  C23F1/00 ,  H01L21/306 ,  C23C16/06 ,  C23C16/22

CPC分类号： C23C14/246 ,  C23C14/12

摘要： Apparatus for metering and vaporizing a particulate material, includes: a metering device for metering particulate material having: a reservoir for receiving particulate material; a housing having first and second openings; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove; a rotating agitator with a plurality of tines disposed in the reservoir and cooperating with the rotating shaft for fluidizing particulate material and transporting it from the reservoir into the groove; cooperating such that particulate material is transported by the groove; a scraper cooperates with the groove to dislodge particulate material retained therein, and deliver metered amounts of particulate material through the second opening; a structure fluidizes the particulate material at the second opening; and a flash evaporator that receives and flash vaporizes the metered particulate material.

摘要翻译： 用于计量和蒸发颗粒材料的装置包括：用于计量颗粒材料的计量装置，具有：用于接收颗粒材料的储存器; 具有第一和第二开口的壳体; 设置在所述内部容积中的旋转轴，所述轴具有光滑的表面和周向凹槽; 旋转搅拌器，其具有设置在容器中的多个尖齿，与旋转轴配合，用于使颗粒材料流化并将其从储存器输送到凹槽中; 配合使得颗粒材料由凹槽输送; 刮刀与槽配合以移除保留在其中的颗粒材料，并通过第二开口输送计量的颗粒材料; 结构在第二开口处使颗粒材料流化; 以及闪蒸蒸发器，其接收并闪蒸计量的颗粒材料。

公开(公告)号：US20110186557A1

公开(公告)日：2011-08-04

申请号：US12699120

申请日：2010-02-03

申请人： Michael Long

发明人： Michael Long

IPC分类号： H05B1/00

CPC分类号： H05B1/00

摘要： A heating structure includes an opening that surrounds a heating element and a heat transfer element. Each heat transfer element is disposed between an exterior surface of the heating element and an interior surface of the opening. A clamping mechanism is used to clamp each heating element against a heat transfer element. Each heat transfer element partially surrounds a heating element and is configured to create at least two elongated and spatially separate contact regions along a length of the heating element. The at least two contact regions form a line of contact between the heating element and the interior surface of the opening when the heating element is clamped against the heat transfer element. The at least two contact regions allow the heating element to transfer heat to the opening and to the tooling device. The clamping mechanism may also be used to transfer heat to the tooling device.

摘要翻译： 加热结构包括围绕加热元件和传热元件的开口。 每个传热元件设置在加热元件的外表面和开口的内表面之间。 夹紧机构用于将每个加热元件夹紧在传热元件上。 每个传热元件部分地围绕加热元件，并且构造成沿着加热元件的长度产生至少两个细长的和空间上分离的接触区域。 当加热元件被夹紧在传热元件上时，至少两个接触区域在加热元件和开口的内表面之间形成接触线。 至少两个接触区域允许加热元件将热量传递到开口和加工装置。 夹紧机构也可用于将热量传递到加工装置。

公开(公告)号：US07951421B2

公开(公告)日：2011-05-31

申请号：US11407840

申请日：2006-04-20

申请人： Yuan-Sheng Tyan ,  Michael Long ,  Giana M. Phelan ,  Thomas R. Cushman

发明人： Yuan-Sheng Tyan ,  Michael Long ,  Giana M. Phelan ,  Thomas R. Cushman

IPC分类号： C23C16/00

CPC分类号： C23C14/246 ,  C23C14/12 ,  H01L27/3209 ,  H01L51/5278

摘要： A method of depositing a layer onto a substrate, comprising heating an evaporator to a temperature capable of completely evaporating the evaporant to be deposited, dispensing into the evaporator one or more quantized units of the evaporant where the evaporant is completely vaporized, providing an area vapor dispenser having a plurality of apertures, and directing the vaporized evaporant from the evaporator to the area vapor dispenser so that the evaporant is dispensed through the apertures to deposit the layer on the substrate.

摘要翻译： 一种在衬底上沉积层的方法，包括将蒸发器加热到能够完全蒸发要沉积的蒸发剂的温度，将蒸发器完全蒸发的蒸发器的一个或多个量化单元分配到蒸发器中，从而提供面积蒸气 分配器具有多个孔，并且将蒸发的蒸发器从蒸发器引导到区域蒸气分配器，使得蒸发器通过孔分配以将层沉积在基底上。

公开(公告)号：US20100206234A1

公开(公告)日：2010-08-19

申请号：US12371940

申请日：2009-02-17

申请人： MICHAEL LONG

发明人： MICHAEL LONG

IPC分类号： C23C16/00

CPC分类号： C23C14/12 ,  C23C14/246

摘要： An apparatus for vaporizing a particulate material, including: a metering apparatus including: a reservoir for receiving particulate material; the reservoir having an opening for discharging the particulate material into a vaporizing chamber; a rotatable wire wheel brush disposed in the reservoir; wherein the dimensions of the reservoir and the wire wheel brush are selected so that the wire wheel brush cooperates with the interior walls of the reservoir to fluidize the particulate material and wherein a metered portion of the particulate material is entrained in the tines of the wire wheel brush and subsequently forcefully released into the reservoir opening; and a flash evaporator that receives and vaporizes the metered material.

摘要翻译： 一种用于蒸发颗粒材料的装置，包括：计量装置，包括：用于接收颗粒材料的储存器; 储存器具有用于将颗粒材料排放到蒸发室中的开口; 设置在储存器中的可旋转的线轮刷; 其中储存器和线轮刷的尺寸被选择为使得线轮刷与储存器的内壁配合以使颗粒材料流化，并且其中颗粒材料的计量部分被夹带在线轮的齿中 刷后随后被强制释放进水库开口; 以及接收并蒸发计量材料的闪蒸器。

公开(公告)号：US07704554B2

公开(公告)日：2010-04-27

申请号：US11745504

申请日：2007-05-08

申请人： Michael Long ,  Randolph C. Brost ,  Jeremy M. Grace ,  Dennis R. Freeman ,  Neil P. Redden ,  Bruce E. Koppe

发明人： Michael Long ,  Randolph C. Brost ,  Jeremy M. Grace ,  Dennis R. Freeman ,  Neil P. Redden ,  Bruce E. Koppe

IPC分类号： C23C16/00

CPC分类号： C23C14/243 ,  C23C14/12 ,  H01L51/001 ,  H01L51/0059 ,  H01L51/0077 ,  H01L51/0081

摘要： A method for vaporizing organic materials onto a substrate surface to form a film including providing a quantity of organic material into a vaporization apparatus and actively maintaining the organic material in a first heating region in the vaporization apparatus to be below the vaporization temperature. The method also includes heating a second heating region of the vaporization apparatus above the vaporization temperature of the organic material and metering, at a controlled rate, organic material from the first heating region into the second heating region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.

摘要翻译： 一种用于将有机材料蒸发到基板表面上以形成膜的方法，所述方法包括向蒸发装置中提供一定数量的有机材料并主动将所述蒸发装置中的第一加热区域中的有机材料维持在汽化温度以下。 该方法还包括将蒸发装置的第二加热区域加热到有机材料的蒸发温度以上，并以受控的速率将有机材料从第一加热区域计量到第二加热区域，使得有机物的薄截面 材料以所需的速率依赖的蒸发温度加热，由此有机材料在衬底表面上蒸发并形成膜。

公开(公告)号：US07625601B2

公开(公告)日：2009-12-01

申请号：US11050924

申请日：2005-02-04

申请人： Michael Long ,  Thomas W. Palone ,  Bruce E. Koppe

发明人： Michael Long ,  Thomas W. Palone ,  Bruce E. Koppe

IPC分类号： C23C16/00

CPC分类号： C23C14/246 ,  C23C14/12 ,  H01L51/001 ,  H01L51/56

摘要： A method for metering powdered or granular material onto a heated surface to vaporize such material, includes providing a container with powdered or granular material having at least one component; providing a rotatable auger disposed in material receiving relationship with the container for receiving powdered or granular material from the container and as the auger rotates, such rotating auger translates such powdered or granular material along a feed path to a feeding location; and providing at least one opening at the feeding location such that the pressure produced by the rotating auger at the feeding location causes the powdered or granular material to be forced through the opening onto the heated surface in a controllable manner.

摘要翻译： 将粉末或颗粒材料计量到加热表面上以蒸发这种材料的方法包括向容器提供具有至少一种组分的粉末状或颗粒状材料; 提供可旋转的螺旋推运器，其设置成与所述容器接合的材料，用于从所述容器接收粉末或颗粒材料，并且当所述螺旋推运器旋转时，所述旋转螺旋钻将所述粉末或颗粒材料沿着进给路径转换到进给位置; 并且在进给位置处提供至少一个开口，使得由馈送位置处的旋转螺旋钻产生的压力导致粉末或颗粒材料以可控的方式被迫穿过加热表面上的开口。

公开(公告)号：US20090176016A1

公开(公告)日：2009-07-09

申请号：US11970548

申请日：2008-01-08

申请人： Michael Long ,  Thomas W. Palone ,  Burce E. Koppe ,  Michael L. Boroson

发明人： Michael Long ,  Thomas W. Palone ,  Burce E. Koppe ,  Michael L. Boroson

IPC分类号： C23C16/448 ,  C23C16/54

CPC分类号： C23C14/246 ,  C23C16/4486

摘要： Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove for receiving particulate material from the reservoir and for discharging the particulate material; the rotatable shaft and the internal volume cooperating such that the particulate material is transported by the circumferential groove and not along the remainder of the rotatable shaft; a scraper disposed in relation to the second opening, having at its end substantially the same cross section as the groove in the rotating shaft, the scraper cooperating with the groove to dislodge particulate material retained therein, and in response to the shaft rotating, delivers metered amounts of particulate material through the second opening; to the flash evaporator.

摘要翻译： 用于蒸发颗粒材料的装置，包括计量装置，包括：储存器; 具有内部体积的壳体和用于分别接收和排出颗粒材料的第一和第二开口; 设置在所述内部容积中的可旋转轴，所述轴具有光滑表面和用于从所述储存器接收颗粒材料并用于排出所述颗粒材料的周向槽; 所述可旋转轴和所述内部容积协调使得所述颗粒材料由所述圆周凹槽而不是沿着所述可旋转轴的其余部分输送; 相对于第二开口设置的刮刀，其端部与旋转轴中的槽基本相同的横截面，刮刀与槽配合以移除保留在其中的颗粒材料，并且响应于轴旋转，传送计量 通过第二开口的颗粒材料的量; 到闪蒸器。

公开(公告)号：US20090155011A1

公开(公告)日：2009-06-18

申请号：US11955012

申请日：2007-12-12

申请人： Robert Alfred Erickson ,  William Michael Long ,  Ted R. Massa

发明人： Robert Alfred Erickson ,  William Michael Long ,  Ted R. Massa

IPC分类号： B23C7/00 ,  B23P11/00

CPC分类号： B23B31/006 ,  B23B2260/026 ,  Y10T29/49826 ,  Y10T409/30952

摘要： A rotary tapered tool holder includes a body and an adapter sleeve disposed about a portion of the body. The body and the adapter sleeve have front and rear contact surfaces with different taper angles. The front contact surfaces are optimized for an interference fit and the rear contact surfaces provide an axial stop and support band when the tool holder is assembled into a clamping receptacle. Face contact is achieved between a flange contact surface of the body and a face contact surface of the clamping receptacle.

摘要翻译： 旋转锥形工具架包括主体和围绕主体的一部分设置的适配器套筒。 主体和适配器套筒具有不同锥角的前后接触面。 前端接触表面经过优化，适合于过盈配合，而后接触表面在工具架组装成夹紧容器时提供轴向止动和支撑带。 在本体的法兰接触表面和夹持容器的面接触表面之间实现面接触。

公开(公告)号：US07501152B2

公开(公告)日：2009-03-10

申请号：US11134654

申请日：2005-05-20

申请人： Michael Long ,  Jeremy M. Grace ,  Bruce E. Koppe

发明人： Michael Long ,  Jeremy M. Grace ,  Bruce E. Koppe

IPC分类号： C23C16/00

CPC分类号： C23C14/246 ,  C23C14/12

摘要： A method for vaporizing particulate materials and condensing them onto a surface to form a layer provides a quantity of particulate material in a first container having an opening, dimensioned to allow free flow of the particulate material through the opening. The particulate material is transferred through the opening to an auger. At least a portion of the auger is rotated to transfer the particulate material from the first container along a feeding path to a vaporization zone where at least a component portion of the particulate material is vaporized and delivered to the surface to form the layer. The auger size is selected to facilitate the free flow of the particulate material through the opening.

摘要翻译： 用于蒸发颗粒材料并将其冷凝到表面上以形成层的方法在具有开口的第一容器中提供一定量的颗粒材料，其尺寸被设计成允许颗粒材料自由流过开口。 颗粒材料通过开口传送到螺旋钻。 螺旋钻的至少一部分被旋转以将颗粒材料从第一容器沿着进料路径转移到蒸发区，其中颗粒材料的至少一部分被蒸发并被输送到表面以形成该层。 选择螺旋钻尺寸以促进颗粒物质通过开口的自由流动。

公开(公告)号：US07501151B2

公开(公告)日：2009-03-10

申请号：US11134139

申请日：2005-05-20

申请人： Michael Long ,  Jeremy M. Grace ,  Bruce E. Koppe

发明人： Michael Long ,  Jeremy M. Grace ,  Bruce E. Koppe

IPC分类号： C23C16/00

CPC分类号： C23C14/548 ,  C23C14/12 ,  C23C14/24 ,  C23C14/246

摘要： A method for vaporizing particulate material and condensing it onto a surface to form a layer provides a quantity of first particulate material in a first container and a quantity of second particulate material in a second container spaced apart from the first container, the first and second containers respectively having first and second openings. The first particulate material is transferred through the first opening in the first container into a manifold and vaporized in the manifold. The second particulate material is transferred through the second opening in the second container into the manifold and vaporized in the manifold, whereby the first and second vaporized particulate materials are mixed. The mixed vaporized materials are delivered from the manifold to the surface to form the layer.

摘要翻译： 用于蒸发颗粒材料并将其冷凝到表面上以形成层的方法在第一容器中提供一定量的第一颗粒材料，并且在与第一容器间隔开的第二容器中提供一定量的第二颗粒材料，第一和第二容器 分别具有第一和第二开口。 第一颗粒材料通过第一容器中的第一开口转移到歧管中并在歧管中汽化。 第二颗粒材料通过第二容器中的第二开口转移到歧管中并在歧管中汽化，由此混合第一和第二蒸发的颗粒材料。 混合的汽化材料从歧管传送到表面以形成该层。