VERTICAL HALL SENSOR STRUCTURE
    61.
    发明申请

    公开(公告)号:US20210003641A1

    公开(公告)日:2021-01-07

    申请号:US16919823

    申请日:2020-07-02

    申请人: TDK-Micronas GmbH

    IPC分类号: G01R33/07 H01L43/06 H01L43/04

    摘要: A vertical Hall sensor structure having a substrate layer, a semiconductor area of a first conductivity type, at least a first, a second and a third semiconductor contact area of the first conductivity type extending from an upper surface of the semiconductor area into the semiconductor area, and at least a first semiconductor contact area of a second conductivity type, wherein the semiconductor contact areas of the first conductivity type are spaced apart from each other and a metal connection contact layer is arranged on each semiconductor contact area of the first conductivity type. The first semiconductor contact area of the second conductivity type is adjacent to the first semiconductor contact area of the first conductivity type or is spaced at a distance of at most 0.2 μm from the first semiconductor contact area of the first conductivity type.

    Measuring system
    62.
    发明授权

    公开(公告)号:US10816611B2

    公开(公告)日:2020-10-27

    申请号:US15666050

    申请日:2017-08-01

    摘要: A measuring system having a magnetic device for generating a magnetic field and at least one magnetic field sensor for detecting a flux density of the magnetic field, at least in a first spatial direction. The magnetic device has a top side facing the magnetic field sensor, the magnetic field sensor is spaced apart from the top side of the magnetic device, the magnetic device has a main magnet, having two poles, with a main magnetizing direction for generating a main magnetic field and at least one secondary magnet, having two poles, with a secondary magnetization direction for generating a secondary magnetic field, the main magnet has larger dimensions than the at least one secondary magnet, the magnetic field is formed by superposition of the main magnetic field and the secondary magnetic field, the secondary magnetic field at least partially compensates the main magnetic field in the first spatial direction.

    Calibration method for a hall effect sensor

    公开(公告)号:US10605872B2

    公开(公告)日:2020-03-31

    申请号:US15843815

    申请日:2017-12-15

    申请人: TDK-Micronas GmbH

    IPC分类号: G01R33/00 G01R35/00 G01R33/07

    摘要: A calibration method for a Hall sensor having a Hall sensitive layer with four electrical contacts and a first field plate, wherein, at a first temperature and at a first magnetic flux density, a resistance value of the Hall sensitive layer is determined for each of at least three different field plate voltages present at the field plate, a calibration curve is produced from the at least three resistance values, a deviation value of the calibration curve is determined from a reference calibration curve, and the field plate voltage that is present at the first field plate or an operating voltage that is present at the sensitive layer is readjusted by a correction value corresponding to the deviation value.

    Position determining sensor unit
    64.
    发明授权

    公开(公告)号:US10564005B2

    公开(公告)日:2020-02-18

    申请号:US15449505

    申请日:2017-03-03

    IPC分类号: G01D5/14 G01D5/251

    摘要: A position determining sensor unit having a number of sensors arranged at predetermined positions along a path, and a transducer. The transducer has a first end which is moveable at least along the entire path, and a length running parallel to the path. Each sensor has a first supply voltage connection, a second supply voltage connection and a switching output, and wherein the switching output is switched into an On-state or an Off-state as a function of the threshold value of a sensor signal being exceeded or undershot. The supply voltage connection of each sensor is connected to a supply voltage, and a first sensor is arranged at a beginning of the path and a last sensor is arranged at an end of the path so that the second supply voltage connection of the first sensor is connected to a reference potential and the first sensor has a power consumption.

    Sensor unit and method for detecting an encoder at a predefined position

    公开(公告)号:US10317479B2

    公开(公告)日:2019-06-11

    申请号:US15668031

    申请日:2017-08-03

    发明人: Joachim Ritter

    摘要: A sensor unit for detecting an encoder at a predefined position, having a circuit device and a threshold signal present at the circuit device, and a magnetic field sensor. The magnetic field sensor has a supply and ground terminal and first and second outputs, and outputs an analog sensor signal that is dependent on the distance of the encoder, and a supply unit connected to the supply terminal of the magnetic field sensor, the supply unit having a control input, and the circuit device is connected to the magnetic field sensor. The circuit device is configured to provide the sensor signal as an amplified signal value, and the circuit device is configured to determine an amount from the difference between the amplified signal value and the threshold signal and to control the amplification of the signal value and the supply unit as a function of the magnitude of the amount.

    Method and apparatus for determining a stray magnetic field in the vicinity of a sensor

    公开(公告)号:US10162019B2

    公开(公告)日:2018-12-25

    申请号:US14812517

    申请日:2015-07-29

    申请人: Micronas GmbH

    发明人: Rolf Hakenes

    IPC分类号: G01R33/07

    摘要: An apparatus (10) for determining a stray magnetic field in the vicinity of a sensor is described. The apparatus (10) has a multipole permanent magnet (60) with four or more poles and an axis of rotation (70). The multipole permanent magnet (60) produces a magnetic field (65) with magnetic field vectors (67). Two vertical Hall sensors (40a and 40) are so arranged in two positions on a circular path (50) about the axis of rotation, such that the sum of the magnet field vectors (67) measured at the two positions is substantially zero.

    Arrangement for testing integrated circuits

    公开(公告)号:US10161997B2

    公开(公告)日:2018-12-25

    申请号:US14746224

    申请日:2015-06-22

    申请人: Micronas GmbH

    发明人: Joachim Ritter

    IPC分类号: G01R31/28 H01L21/66

    摘要: An arrangement for testing integrated circuits includes an integrated test circuit and a cluster which has at least one integrated circuit and a second integrated circuit. The first integrated circuit is provided in a first component region of a wafer, and the second integrated circuit in a second component region. The first component region and the second component region are spaced a distance apart by a scribe line of the wafer. The integrated test circuit is connected to the first integrated circuit via a first test line section, and the second integrated circuit is connected to the first test line section via a first connecting line that has a first well in the semiconductor material, the first well extending continuously in the wafer from the first component region over the scribe line to the second component region, the first well being electrically insulated from a substrate of the wafer.

    MEASURING SYSTEM FOR DETERMINING THE ANGLE OF ROTATION

    公开(公告)号:US20180283900A1

    公开(公告)日:2018-10-04

    申请号:US15941825

    申请日:2018-03-30

    申请人: TDK-Micronas GmbH

    发明人: Yan BONDAR

    IPC分类号: G01D5/14

    CPC分类号: G01D5/14 G01B7/30 G01D5/147

    摘要: A measuring system for determining an angle of rotation of a shaft, which is rotatable about an axis of rotation, having a magnetically conductive encoder, which is spaced from the axis of rotation and fixedly connected to the shaft, a magnet unit with a permanent magnet, and an intermediate sensor unit having two magnetic field sensors. The permanent magnet has a magnetization extending parallel to the axis of rotation, and a circular-cylindrical recess having a bottom, an axis of symmetry extending perpendicular to the bottom, and a diameter, the sensor unit being completely arranged within the recess and stationary with respect to the permanent magnet. The first distance of the encoder from the axis of rotation being less than half the diameter of the recess, the encoder being arranged in a direction parallel to the axis of rotation at a second distance from the sensor unit.

    Sensor device
    69.
    发明授权

    公开(公告)号:US09933495B2

    公开(公告)日:2018-04-03

    申请号:US14674249

    申请日:2015-03-31

    申请人: Micronas GmbH

    摘要: A sensor device for suppressing a magnetic stray field, having a semiconductor body, a first pixel cell and a second pixel cell integrated into a surface of the semiconductor body together with a circuit arrangement. Each pixel cell has a first magnetic field sensor and a second magnetic field sensor to detect a magnetic field in the x-direction and a magnetic field in the y-direction. The first pixel cell is spaced apart from the second pixel cell along a connecting line, and the substrate and the semiconductor body are disposed in the same IC package. A magnet is provided that has a planar main extension surface in the direction of an x-y plane and has a magnetization with four magnetic poles in the direction of the x-y plane. The IC package is spaced apart from the main extension surface of the magnet in the z-direction and at least partially within a ring magnet.

    Apparatus and method for contactless measurement of an angle

    公开(公告)号:US09933279B2

    公开(公告)日:2018-04-03

    申请号:US14755291

    申请日:2015-06-30

    申请人: Micronas GmbH

    发明人: David Muthers

    CPC分类号: G01D5/145

    摘要: An apparatus 10 for the contactless measurement of a rotation angle 15 is described. A permanent magnet 60 having a number of poles, wherein the number of poles amounts to four or more and cannot be divided by three, is mounted on the front of an axle. In a plane below the permanent magnet 16 at least three first lateral Hall sensors 40a-c are located in a circular path 50. A method for calculation the rotation angle 15 with the aid of the lateral Hall sensors 40a-40c is also described.