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公开(公告)号：US11698388B2
公开(公告)日：2023-07-11
申请号：US17122793
申请日：2020-12-15
Applicant: STMicroelectronics S.r.l.
Inventor： Jean Marie Darmanin , Carlo Valzasina , Alessandro Tocchio , Gabriele Gattere
IPC: G01P15/125 , G01P15/00
CPC classification number: G01P15/125
Abstract: A micromechanical device includes a semiconductor body, a first mobile structure, an elastic assembly, coupled to the first mobile structure and to the semiconductor body and adapted to undergo deformation in a direction, and at least one abutment element. The elastic assembly is configured to enable an oscillation of the first mobile structure as a function of a force applied thereto. The first mobile structure, the abutment element and the elastic assembly are arranged with respect to one another in such a way that: when the force is lower than a force threshold, the elastic assembly operates with a first elastic constant; and when the force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant different from the first elastic constant.
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公开(公告)号：US10897215B2
公开(公告)日：2021-01-19
申请号：US15913590
申请日：2018-03-06
Applicant: STMicroelectronics S.r.l.
Inventor： Francesco Procopio , Carlo Valzasina , Alberto Corigliano , Raffaele Ardito , Giacomo Gafforelli
IPC: H02N2/18
Abstract: A piezoelectric transducer for energy-harvesting systems includes a substrate, a piezoelectric cantilever element, a first magnetic element, and a second magnetic element, mobile with respect to the first magnetic element. The first magnetic element is coupled to the piezoelectric cantilever element. The first magnetic element and the second magnetic element are set in such a way that, in response to relative movements between the first magnetic element and the second magnetic element through an interval of relative positions, the first magnetic element and the second magnetic element approach one another without coming into direct contact, and the interaction between the first magnetic element and the second magnetic element determines application of a force pulse on the piezoelectric cantilever element.
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公开(公告)号：US10812090B2
公开(公告)日：2020-10-20
申请号：US16681469
申请日：2019-11-12
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio Mussi , Giacomo Langfelder , Carlo Valzasina , Gabriele Gattere
Abstract: In an embodiment, a clock generator has a variable-modulus frequency divider that receives a high-frequency clock signal and outputs a divided clock signal having a frequency controlled by a modulus-control signal generated by a temperature-compensation circuit. A jitter filter is coupled to the output of the variable-modulus frequency divider and to the temperature-compensation circuit and generates a compensated clock signal having switching edges that are delayed, with respect to the divided clock signal, by a time correlated to a quantization-error signal.
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公开(公告)号：US10794738B2
公开(公告)日：2020-10-06
申请号：US16049262
申请日：2018-07-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Dario Paci , Francesco Procopio , Carlo Valzasina , Paolo Angelini , Francesco Diazzi , Roberto Pio Baorda , Danilo Karim Kaddouri
Abstract: An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.
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55.发明授权
公开(公告)号：US10771042B2
公开(公告)日：2020-09-08
申请号：US15976611
申请日：2018-05-10
Applicant: STMicroelectronics S.r.l.
Inventor： Gabriele Gattere , Lorenzo Corso , Alessandro Tocchio , Carlo Valzasina
Abstract: A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.
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公开(公告)号：US20200169262A1
公开(公告)日：2020-05-28
申请号：US16681469
申请日：2019-11-12
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio Mussi , Giacomo Langfelder , Carlo Valzasina , Gabriele Gattere
Abstract: In an embodiment, a clock generator has a variable-modulus frequency divider that receives a high-frequency clock signal and outputs a divided clock signal having a frequency controlled by a modulus-control signal generated by a temperature-compensation circuit. A jitter filter is coupled to the output of the variable-modulus frequency divider and to the temperature-compensation circuit and generates a compensated clock signal having switching edges that are delayed, with respect to the divided clock signal, by a time correlated to a quantization-error signal.
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57.发明申请
公开(公告)号：US20200064134A1
公开(公告)日：2020-02-27
申请号：US16664041
申请日：2019-10-25
Applicant: STMicroelectronics S.r.l.
Inventor： Gabriele Gattere , Luca Giuseppe Falorni , Carlo Valzasina
IPC: G01C19/5712
Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.
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58.发明申请
公开(公告)号：US20200049505A1
公开(公告)日：2020-02-13
申请号：US16655096
申请日：2019-10-16
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Gabriele Gattere , Carlo Valzasina , Luca Giuseppe Falorni
IPC: G01C19/5747 , G01C19/5712
Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.
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公开(公告)号：US10480942B2
公开(公告)日：2019-11-19
申请号：US15273312
申请日：2016-09-22
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Gabriele Gattere , Carlo Valzasina , Luca Giuseppe Falorni
IPC: G01C19/5747 , G01C19/5712
Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.
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公开(公告)号：US10466052B2
公开(公告)日：2019-11-05
申请号：US15201133
申请日：2016-07-01
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Carlo Valzasina , Luca Giuseppe Falorni
IPC: G01C19/5712 , G01C19/56 , G01C19/5719 , G01C19/574 , G01C19/5747
Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.
