FILLING APPARATUS USED IN AN EVAPORATOR SYSTEM AND FILLING METHOD
    41.
    发明申请
    FILLING APPARATUS USED IN AN EVAPORATOR SYSTEM AND FILLING METHOD 审中-公开
    在蒸发器系统中使用的填充装置和填充方法

    公开(公告)号:US20170077458A1

    公开(公告)日:2017-03-16

    申请号:US15085050

    申请日:2016-03-30

    CPC classification number: H01L51/56 C23C14/12 C23C14/24 C23C14/246 H01L2251/56

    Abstract: A filling apparatus used in an evaporator system and a filling method are provided. The filling apparatus includes: a filling bottle, a magnetic cover plate, an evaporation material trough and a magnetic induction drive unit, wherein the magnetic cover plate is provided at an opening of the filling bottle, in operation the opening of the filling bottle is provided to orientate the evaporation material trough, the magnetic induction drive unit is disposed outside of the opening, and configured to be capable of driving the magnetic cover plate to open and close.

    Abstract translation: 提供了一种在蒸发器系统中使用的填充装置和填充方法。 填充装置包括:填充瓶,磁性盖板,蒸发材料槽和磁感应驱动单元,其中磁性盖板设置在填充瓶的开口处,在操作中提供填充瓶的开口 为了使蒸发材料槽定向,磁感应驱动单元设置在开口的外侧,并且构造成能够驱动磁性盖板打开和关闭。

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