公开(公告)号：US09748087B2

公开(公告)日：2017-08-29

申请号：US14622066

申请日：2015-02-13

Applicant: USHIO DENKI KABUSHIKI KAISHA

Inventor： Masahiko Kase ,  Takayuki Hiraishi

IPC: H01J61/00 ,  H01J61/36 ,  H01J61/90 ,  H01J61/073 ,  H01J61/54 ,  H01J61/86

CPC classification number: H01J61/366 ,  H01J61/073 ,  H01J61/545 ,  H01J61/547 ,  H01J61/86 ,  H01J61/90

Abstract: Disclosed herein are a short arc type flash lamp having high lamp starting performance and capable of reducing the diameter of its seal tube part, and a light source device thereof. The flash lamp has an electrode shaft of one of the main electrodes, and an electrode shaft of the other of the main electrodes and leads for starting auxiliary electrodes which are respectively led out from the second seal tube part, and an external trigger is disposed in a state in which it extends in the circumferential direction on the outer peripheral surface of one end side region of the second seal tube part. The light source device is structured by a concave reflection mirror disposed on the second seal tube part side of the flash lamp in a state in which a focal point of the concave reflection mirror coincides with a luminous point of the flash lamp.

公开(公告)号：US09357626B2

公开(公告)日：2016-05-31

申请号：US14548734

申请日：2014-11-20

Applicant: ASML Netherlands B.V.

Inventor： Henricus Petrus Maria Pellemans ,  Pavel Stanislavovich Antsiferov ,  Vladimir Mihailovitch Krivtsun ,  Johannes Matheus Marie De Wit ,  Ralph Jozef Johannes Gerardus Anna Maria Smeets ,  Gerbrand Van Der Zouw

IPC: G21K5/04 ,  H01J65/04 ,  H05H1/24 ,  G03F7/20 ,  G01N21/956 ,  H05G2/00 ,  H01J61/54 ,  H01J61/02 ,  H05B41/38

CPC classification number: H05H1/24 ,  G01N21/956 ,  G01N2201/061 ,  G03F7/20 ,  G03F7/70033 ,  G03F7/70483 ,  G03F7/70616 ,  G03F7/70641 ,  H01J61/02 ,  H01J61/54 ,  H01J61/545 ,  H01J65/04 ,  H05B41/38 ,  H05G2/003 ,  H05G2/008

Abstract: A laser driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a container containing a gas (e.g., Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. Plasma has an elongate form (L>d) and collecting optics is configured to collect photons emerging in the longitudinal direction from the plasma. The brightness of the plasma is increased compared with sources which collect radiation emerging transversely from the plasma. A metrology apparatus using the light source can achieve greater accuracy and/or throughput as a result of the increased brightness. Back reflectors may be provided. Microwave radiation may be used instead of laser radiation to form the plasma.

Abstract translation: 激光驱动光源包括激光和聚焦光学元件。 这些产生聚焦在容纳气体（例如Xe）的容器内的等离子体形成区域上的辐射束。 收集光学器件收集由激光辐射维持的等离子体发射的光子以形成输出辐射束。 等离子体具有细长形式（L> d），并且收集光学器件被配置为收集从等离子体沿纵向出现的光子。 与收集从等离子体横向辐射的辐射的源相比，等离子体的亮度增加。 使用光源的计量装置可以由于亮度的增加而获得更高的精度和/或吞吐量。 可以提供背反射器。 可以使用微波辐射代替激光辐射以形成等离子体。

公开(公告)号：US20150262808A1

公开(公告)日：2015-09-17

申请号：US14215063

申请日：2014-03-17

Applicant: Weifeng Wang

Inventor： Weifeng Wang

IPC: H01J65/04 ,  H05H1/46 ,  H05H1/48

CPC classification number: H01J65/04 ,  H01J61/025 ,  H01J61/34 ,  H01J61/545 ,  H05H1/46 ,  H05H1/48

Abstract: A light source includes an enveloped chamber (32) enclosing an ionizable medium (46) and at least one laser source to provide continuous energy to the plasma (64), i.e. the excited and ionized medium, for producing high-brightness light. The envelop (34) prevents the thermal convection on the inner chamber and provides insulation to the heat transferred out of the plasma so as to generate more stable and stronger emission of light. A method for producing enhanced-brightness light includes the using of multiple chamber assemblies (178a and 178b) and at least one laser source (164) to power the plasma within each chamber assembly in sequence. A method for improving the efficiency of laser usage includes a procedure to re-focus the unabsorbed laser beam (270) back to the same plasma (272) so that more laser energy can be absorbed by the plasma to deliver increased light output.

Abstract translation: 光源包括封闭可电离介质（46）的包封室（32）和至少一个激光源，以向等离子体（64）提供持续的能量，即激发和离子化的介质，用于产生高亮度光。 信封（34）防止内室上的热对流，并为从等离子体传出的热量提供绝缘，从而产生更稳定和更强的光发射。 用于产生增强亮度光的方法包括使用多个室组件（178a和178b）和至少一个激光源（164）来依次对每个室组件内的等离子体供电。 用于提高激光使用效率的方法包括将未吸收的激光束（270）重新聚焦回相同等离子体（272）的过程，使得可以通过等离子体吸收更多的激光能量以递送增加的光输出。

公开(公告)号：US20150249003A1

公开(公告)日：2015-09-03

申请号：US14622066

申请日：2015-02-13

Applicant: USHIO DENKI KABUSHIKI KAISHA

Inventor： Masahiko KASE ,  Takayuki HIRAISHI

IPC: H01J61/02 ,  H01J61/30 ,  H01J61/54 ,  H01J61/36 ,  H01J61/90 ,  H01J61/073

CPC classification number: H01J61/366 ,  H01J61/073 ,  H01J61/545 ,  H01J61/547 ,  H01J61/86 ,  H01J61/90

Abstract: Disclosed herein are a short arc type flash lamp having high lamp starting performance and capable of reducing the diameter of its seal tube part, and a light source device thereof. The flash lamp has an electrode shaft of one of the main electrodes, and an electrode shaft of the other of the main electrodes and leads for starting auxiliary electrodes which are respectively led out from the second seal tube part, and an external trigger is disposed in a state in which it extends in the circumferential direction on the outer peripheral surface of one end side region of the second seal tube part. The light source device is structured by a concave reflection mirror disposed on the second seal tube part side of the flash lamp in a state in which a focal point of the concave reflection mirror coincides with a luminous point of the flash lamp.

Abstract translation: 这里公开了一种具有高灯起动性能并且能够减小其密封管部分的直径的短弧型闪光灯及其光源装置。 闪光灯具有主电极之一的电极轴和另一个主电极的电极轴和用于起动辅助电极的引线，其分别从第二密封管部分引出，外部触发器设置在 在第二密封管部的一端侧区域的外周面上沿圆周方向延伸的状态。 光源装置由设置在闪光灯的第二密封管部分侧的凹面反射镜构成，其中凹面反射镜的焦点与闪光灯的发光点重合。

公开(公告)号：US09099292B1

公开(公告)日：2015-08-04

申请号：US12787827

申请日：2010-05-26

Applicant: Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Yanming Zhao ,  Gildardo R. Delgado

IPC: H01J1/02 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54

CPC classification number: H05H1/24 ,  H01J1/025 ,  H01J23/033 ,  H01J61/09 ,  H01J61/28 ,  H01J61/52 ,  H01J61/54 ,  H01J61/545 ,  H01J65/042

Abstract: A laser sustained plasma light source having a cell formed as a continuous tube with a circular cross section, a gas volume contained within the cell, at least one laser directed into the gas volume, for sustaining a plasma within the gas volume, the plasma producing a light, where the gas volume is heated as it leaves the plasma, cools as it circulates around the continuous tube of the cell, and reenters the plasma cooler than when it left the plasma and in a laminar flow, and a reflector for collecting the light and providing the light to a desired location.

Abstract translation: 一种激光持续等离子体光源，其具有形成为圆形横截面的连续管的单元，容纳在该单元内的气体体积，至少一个引导到气体体积中的激光，用于维持气体体积内的等离子体，等离子体产生 气体体积在离开等离子体时被加热的光在其围绕电池的连续管周围循环时冷却，并且比等离子体离开等离子体和层流时重新进入等离子体冷却器，以及用于收集等离子体的反射器 光并将光提供到所需位置。

公开(公告)号：US20140320008A1

公开(公告)日：2014-10-30

申请号：US14330463

申请日：2014-07-14

Applicant: Lucidity Lights, Inc.

Inventor： John R. Goscha ,  Victor D. Roberts ,  Walter Peter Lapatovich ,  David Alan Goodman ,  David Wentzel

IPC: H01J65/04

CPC classification number: H01J65/048 ,  H01J61/28 ,  H01J61/523 ,  H01J61/545 ,  H05B41/2806 ,  H05B41/382 ,  Y02B20/22

Abstract: A processor controlled induction RF fluorescent lamp, where the processor controls a rapid startup function, the lamp comprising a lamp envelope filled with a gas mixture at less than typical atmospheric pressure, wherein the lamp envelope comprises at least one metallic structure for collecting mercury; a power coupler comprising at least one winding of an electrical conductor; an electronic ballast, wherein the electronic ballast provides appropriate voltage and current to the power coupler; and where the processor controls the rapid startup function to increase power at lamp startup to rapidly heat and vaporize the mercury collected on the at least one metallic structure to promote rapid luminous development during the turn-on phase of the induction RF fluorescent lamp.

Abstract translation: 一种处理器控制的感应RF荧光灯，其中所述处理器控制快速启动功能，所述灯包括在小于典型大气压下填充有气体混合物的灯壳，其中所述灯壳包括用于收集汞的至少一个金属结构; 功率耦合器，包括电导体的至少一个绕组; 电子镇流器，其中电子镇流器向功率耦合器提供适当的电压和电流; 并且其中处理器控制快速启动功能以增加灯启动时的功率，以快速加热和汽化在至少一个金属结构上收集的汞，以促进在感应RF荧光灯的接通阶段期间的快速发光。

公开(公告)号：US20140239804A1

公开(公告)日：2014-08-28

申请号：US14186722

申请日：2014-02-21

Applicant: Bourns, Inc.

Inventor： John KELLY ,  Johan SCHLEIMANN-JENSEN ,  Jan HEATH ,  Craig Robert SHIPLEY ,  Gordon L. BOURNS

IPC: H01J61/30 ,  H01J9/18

CPC classification number: H01T4/02 ,  H01J61/305 ,  H01J61/545 ,  H01J61/92 ,  H01T1/04 ,  H01T1/10 ,  H01T1/20 ,  H01T4/12 ,  H01T21/00

Abstract: Disclosed are devices and methods related to flat gas discharge tubes (GDTs). In some embodiments, a plurality of GDTs can be fabricated from an insulator plate having a first side and a second side, with the insulator plate defining a plurality of openings. Each opening can be covered by first and second electrodes on the first and second sides of the insulator plate to thereby define an enclosed gas volume configured for GDT operation. Various examples related to such GDTs, including electrode configurations, opening configurations, pre-ionization features, grouping of a GDT with another GDT or device, and packaging configurations, are disclosed.

Abstract translation: 公开了与平坦气体放电管（GDT）相关的装置和方法。 在一些实施例中，多个GDT可以由具有第一侧和第二侧的绝缘板制造，绝缘板限定多个开口。 每个开口可以由绝缘板的第一和第二侧上的第一和第二电极覆盖，从而限定被配置用于GDT操作的封闭气体体积。 公开了与这种GDT相关的各种实例，包括电极配置，开口配置，预电离特征，GDT与另一GDT或器件的分组以及封装结构。

公开(公告)号：US20100164410A1

公开(公告)日：2010-07-01

申请号：US12595064

申请日：2008-04-14

Applicant: Georg Greuel ,  Wolfgang Schiene ,  Norbert Braun

Inventor： Georg Greuel ,  Wolfgang Schiene ,  Norbert Braun

IPC: H01J61/54

CPC classification number: H01J61/545 ,  H01J65/046

Abstract: A dielectric barrier discharge (DBD-) lamp (1) comprising a discharge volume (2) which is delimited by a first and a second wall (4, 5) is disclosed, wherein both walls (4, 5) are exposed to different electrical potentials by means of a power supply (11) for exciting a gas discharge within the discharge volume (2). By providing at least one electrically conductive ignition aid or igniter which extends within the discharge volume (2) and which electrically contacts the first and the second wall (4, 5) with each other, a significant reduction of the initial ignition voltage of the lamp (1) can be obtained, especially after long pauses of operation of the lamp (1).

Abstract translation: 公开了一种包括由第一和第二壁（4,5）限定的排出容积（2）的电介质阻挡放电（DBD-）灯（1），其中两个壁（4,5）暴露于不同的电 借助于用于激发放电容积（2）内的气体放电的电源（11）的电位。 通过提供至少一个在排出容积（2）内延伸并且与第一和第二壁（4,5）电接触的导电点火助剂或点火器，使得灯的初始点火电压显着降低 （1），特别是在长时间停止灯（1）的操作之后。

公开(公告)号：US20100026199A1

公开(公告)日：2010-02-04

申请号：US12532162

申请日：2008-02-22

Applicant: Harald Dellian ,  Joerg Rink

Inventor： Harald Dellian ,  Joerg Rink

IPC: H01J1/00 ,  H05B41/26

CPC classification number: H01J65/04 ,  H01J61/54 ,  H01J61/545 ,  H01J65/046

Abstract: A dielectric barrier discharge lamp is provided, which may include an anode and a cathode, a discharge vessel with an exhaust tube, at least one starting electrode which is arranged along the outer side of the exhaust tube, a starting coating, which is arranged in the inner side of the exhaust tube, wherein the starting coating is arranged centrally over the starting electrode, and this starting electrode is connected to the cathode.

Abstract translation: 提供介质阻挡放电灯，其可以包括阳极和阴极，具有排气管的放电容器，沿着排气管的外侧布置的至少一个起动电极，起始涂层，其布置在 排气管的内侧，其中起始涂层布置在起始电极的中央，并且该起始电极连接到阴极。

公开(公告)号：US07256544B2

公开(公告)日：2007-08-14

申请号：US10989003

申请日：2004-11-16

Applicant: Seung-hyun Son ,  Hyoung-bin Park ,  Gi-young Kim ,  Kyung-min Chung ,  Young-mo Kim ,  Sang-hun Jang ,  Seong-eui Lee

Inventor： Seung-hyun Son ,  Hyoung-bin Park ,  Gi-young Kim ,  Kyung-min Chung ,  Young-mo Kim ,  Sang-hun Jang ,  Seong-eui Lee

IPC: H01J17/49

CPC classification number: H01J61/545 ,  H01J65/046

Abstract: Provided is a plasma flat lamp. The provided lamp includes a discharge gas filled in a discharge area of a discharge container, at least two electrodes generating a gas discharge in the discharge area, a low work function material layer located in a discharge path between the electrodes and collided against gas ions that are generated by the gas discharge, and a fluorescent layer generating visible rays by ultraviolet rays that are generated by the gas discharge in the discharge container. The provided plasma flat lamp reduces a driving voltage due to the low work function material layer against which ions are collided, and increases luminescent efficiency by reducing the absorption of ultraviolet rays of the low work function material layer.

Abstract translation: 提供了一种等离子体平板灯。 所提供的灯包括填充在放电容器的放电区域中的放电气体，在放电区域中产生气体放电的至少两个电极，位于电极之间的放电路径中并与气体离子碰撞的低功函数材料层， 通过气体放电产生的荧光层和通过在放电容器中的气体放电产生的紫外线产生可见光的荧光层。 所提供的等离子体平板灯由于与离子相碰撞的低功函数材料层而降低驱动电压，并且通过降低低功函数材料层的紫外线的吸收来提高发光效率。