Abstract:
A reed switch 10 includes a cylindrical glass tube 30 and a plurality of reeds 20 fixed to the glass tube 30 in a state where an end side including a contact point portion 22 of each of the reeds 20 is inserted in the glass tube 30. The reeds 20 are each produced by forming, by plastic working, a contact point portion 22 on an end side of a wire for a reed switch. The wire for a reed switch is composed of an iron-group alloy containing, by percent by mass, 1% or more and 10% or less of Fe, 10% or more and 35% or less of Ni, and the balance being Co and impurities and having a cubic crystal structure. The wire has a Curie temperature of 900° C. or higher and a wire diameter of 1 mm or less. The wire is composed of a ternary alloy having a particular composition. Therefore, the wire has a high Curie temperature, a low resistance, and a particular structure and thus has good workability.
Abstract:
A monitoring device and a driving control system for a fan filter unit in a semiconductor clean room for monitoring the operating state of the fan filter unit. The monitoring device includes a switching section in each fan filter unit which alternately applies electrical power to one of a plurality of terminals. The switching section is responsive to a force from an air stream introduced therein via rotation of a fan in the fan filter unit. A display section in each fan filter unit is connected to the plurality of terminals which provide different signals, indicative of an on or off state of the fan, according to which of the plurality of terminals is electrically connected to the electrical power.