公开(公告)号：US11910515B2

公开(公告)日：2024-02-20

申请号：US17595064

申请日：2020-05-07

Applicant: Excillum AB

Inventor： Ulf Lundström ,  Björn Hansson ,  Per Takman ,  Tomi Tuohimaa

IPC: H01J35/00 ,  H05G2/00 ,  F04B17/04 ,  F04B15/02 ,  F04B17/03 ,  H01J35/08

CPC classification number: H05G2/006 ,  F04B15/02 ,  F04B17/03 ,  F04B17/04 ,  H01J35/112 ,  H01J2235/082 ,  H01J2235/1026

Abstract: An electromagnetic pump for pumping an electrically conductive liquid, including a first conduit section and a second conduit section. The electromagnetic pump further includes a current generator arranged to provide an electric current through the liquid in the first conduit section and the liquid in the second conduit section such that a direction of the electric current is intersecting the flow of the liquid in the first conduit section and in the second conduit section, and a magnetic field generating arrangement arranged to provide a magnetic field passing through the liquid in the first conduit section and the second conduit section such that a direction of the magnetic field is intersecting the flow of the liquid and the direction of the electric current.

公开(公告)号：US11728122B2

公开(公告)日：2023-08-15

申请号：US17483000

申请日：2021-09-23

Applicant: Moxtek, Inc.

Inventor： Kasey Otho Greenland

IPC: H01J35/16 ,  H01J35/08

CPC classification number: H01J35/16 ,  H01J35/112 ,  H01J2235/168

Abstract: Electrons can rebound from an x-ray tube target, causing electrical-charge build-up on an inside of the x-ray tube. The charge build-up can increase voltage gradients inside of the x-ray tube, resulting in arcing failure of the x-ray tube. Also, the electrical charge can build unevenly on internal walls of the x-ray tube, causing an undesirable shift of the electron-beam. An x-ray tube (10 or 20) with multiple protrusions (19) on an interior wall of a drift-tube (18) can reduce this electrical-charge build-up. The protrusions (19) can reflect stray electrons back to the anode target (14), thus suppressing backscatter. Each protrusion (19) can have a peak (19p) extending into the hole (18h), and receding to a base (19b) farther from the electron-beam, on an entry-side (19en) nearest the drift-tube-entry (18en) and on an exit-side (19ex) nearest the drift-tube-exit (18ex).

公开(公告)号：US20180068821A1

公开(公告)日：2018-03-08

申请号：US15256692

申请日：2016-09-05

Applicant: Mark F. Eaton

Inventor： Mark F. Eaton

IPC: H01J35/08 ,  H01J35/06 ,  H01J29/08 ,  G03F7/20

CPC classification number: H01J35/08 ,  G03F7/7005 ,  G21K1/067 ,  G21K2201/067 ,  H01J29/085 ,  H01J35/06 ,  H01J35/112 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/086

Abstract: An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.