公开(公告)号：US20140263053A1

公开(公告)日：2014-09-18

申请号：US13797045

申请日：2013-03-12

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Wen-Yun Wang ,  Cheng-Han Wu ,  Ching-Yu Chang

IPC: B01D65/06

CPC classification number: B01D65/06 ,  B01D65/006 ,  B01D67/0088 ,  B01D71/26 ,  B01D71/56 ,  B01D2313/16 ,  G03F7/16

Abstract: A system and method for treating a filter is provided. In an embodiment the filter is treated by pre-rinsing the filter membrane with a buffer solvent. The buffer solvent can be used to reduce or eliminate energy differences between the surface of the filter membrane and the process liquid which is being filtered. The pre-rinse may be performed prior to shipment or, alternatively, may be performed after shipment of the filter to a customer.

Abstract translation: 提供了一种处理过滤器的系统和方法。 在一个实施方案中，通过用缓冲溶剂预过滤膜来处理过滤器。 缓冲溶剂可用于减少或消除过滤膜表面与被过滤的工艺液体之间的能量差异。 预漂洗可以在装运之前进行，或者可以在将过滤器装运给客户之后进行。